Title:
HARD CARBON FILM, MANUFACTURING METHOD FOR SAME, AND SLIDING MEMBER
Document Type and Number:
WIPO Patent Application WO/2018/155385
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide technology for manufacturing a hard carbon film that effectively inhibits occurrences of abrasive wear and has greatly reduced coefficient of friction while maintaining abrasion resistance and seizing resistance without inviting reductions in productivity and increased costs in a sliding member used in lubricating oil that includes MoDTC. Provided is a hard carbon film configured such that a second hard carbon film is a laminated on a first hard carbon film, the second hard carbon film has a lower hardness than the first hard carbon film, and a plurality of protruding shapes are formed on the first hard carbon film so as to protrude toward the second hard carbon film. Also provided is a manufacturing method for a hard carbon film that includes a step for forming the first hard carbon film while growing the plurality of protruding shapes on the surface using arc ion plating and a step for forming the second hard carbon film with a lower hardness than the first hard carbon film using CVD or sputtering.
Inventors:
OOSHIRO TAKEHIKO (JP)
FUKUTANI YUKAKO (JP)
MIYAKE KOJI (JP)
FUKUTANI YUKAKO (JP)
MIYAKE KOJI (JP)
Application Number:
PCT/JP2018/005765
Publication Date:
August 30, 2018
Filing Date:
February 19, 2018
Export Citation:
Assignee:
NIPPON ITF INC (JP)
International Classes:
C23C14/06; C01B32/05; C23C14/24; C23C14/32; C23C16/27; B23B27/14; B23B27/20
Domestic Patent References:
| WO2016042629A1 | 2016-03-24 |
Foreign References:
| JP2001261318A | 2001-09-26 | |||
| JP2009061540A | 2009-03-26 | |||
| JP2016196690A | 2016-11-24 |
Attorney, Agent or Firm:
JODAI Tetsuji et al. (JP)
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