Title:
HEAT INSULATING CYLINDER, METHOD FOR MANUFACTURING HEAT INSULATING CYLINDER, AND APPARATUS FOR MANUFACTURING SINGLE CRYSTAL
Document Type and Number:
WIPO Patent Application WO/2012/077279
Kind Code:
A1
Abstract:
A heat insulating cylinder of the present invention is provided for the purpose of protecting a chamber from radiation heat of a heater, by disposing the heater in the chamber and disposing the heat insulating cylinder to surround the heater. The heat insulating cylinder is characterized in that the heat insulating portion of the heat insulating cylinder has reflecting layers, each of which is composed of a black lead sheet or a metal thin film having a melting point of 1,800°C or higher, and that two or more of the reflecting layers are disposed at intervals in the thickness direction. Consequently, the heat insulating cylinder effectively suppresses, by radiation attenuation and gas transfer suppression, heat loss from the heater to the chamber, in the cases where the heat insulating material size generally has a thickness of 50-150mm, which is not thick enough, in the in-furnace outermost circumferential portion inside of the chamber.
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Inventors:
SUGAWARA KOSEI (JP)
HOSHI RYOJI (JP)
HOSHI RYOJI (JP)
Application Number:
PCT/JP2011/006289
Publication Date:
June 14, 2012
Filing Date:
November 10, 2011
Export Citation:
Assignee:
SHINETSU HANDOTAI KK (JP)
SUGAWARA KOSEI (JP)
HOSHI RYOJI (JP)
SUGAWARA KOSEI (JP)
HOSHI RYOJI (JP)
International Classes:
C30B15/00; C30B29/06
Foreign References:
| JPS63149142A | 1988-06-21 | |||
| JPH09235181A | 1997-09-09 | |||
| JPH08337491A | 1996-12-24 | |||
| JP2005145793A | 2005-06-09 | |||
| JPH02255592A | 1990-10-16 |
Attorney, Agent or Firm:
YOSHIMIYA, Mikio (JP)
Good Miya Mikio (JP)
Good Miya Mikio (JP)
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Claims: