DESCRIPTION

HEAT TRANSFER CONTROLLING MECHANISM AND FUEL CELL SYSTEM HAVING THE HEAT TRANSFER CONTROLLING MECHANISM

TECHNICAL FIELD

The present invention relates to a heat transfer controlling mechanism, and a fuel cell system having the heat transfer controlling mechanism mounted thereon, and more particularly to a heat transfer controlling mechanism including a loop heat pipe for allowing a working fluid to flow in a predetermined direction and for controlling the heat transfer amount thereof according to circumstances.

BACKGROUND ART

As a mechanism in which a working fluid is sealed within a closed space and highly efficient heat transfer is performed by using the vaporization and condensation thereof, there has been known the heat pipe.

In the heat pipe, a working fluid which has received heat is vaporized at a vaporizing portion, moves within a tubular path, and is then cooled at a condensing portion to thereby return to liquid. The condensed working fluid is transported to the

vaporizing portion again (reflux or reflow) .

There are many cases where the heat transport efficiency of a heat pipe is determined by the rate of the reflux. Therefore, in order to accelerate the reflux, there have been performed an attempt in which the flow path is directed downwardly to utilize gravity, and an attempt in which a wick is provided to utilize a capillary force.

Among such attempts, heat pipes of a type in which working fluid is circulated within a loop- shaped closed space is called loop heat pipe, and has hitherto been studied mainly for cosmic purpose. These heat pipes are called CPL (Capillary Pumped Loop), LHP (Loop Heat pipe), and the like. This loop heat pipe includes a vaporizer, a condenser, a reserver, a loop pipe connecting these elements, and a working fluid for circulating within the pipe.

In the loop heat pipe, since there is no necessity to allow a flow path to be directed downwardly for hastening of reflux, the limitation of orientation thereof is relaxed as compared to a linear heat pipe using a linear pipe. Moreover, the degree of freedom of the shape thereof can be improved.

In such a loop heat pipe, it is important to allow a working fluid to flow in a predetermined

direction without back flow in a loop flow path.

For this reason, in Japanese Patent Application Laid-Open No. H07-332881, there are provided a forced circulation flow generating means (electromagnetic pump or the like) for preventing back flow and a flow rate adjusting means (flow rate adjusting valve) for adjusting circulation flow rate of a working fluid.

Moreover, in Japanese Patent Application Laid- • Open No. 2003-148882, there is adopted a configuration in which a fluid reservoir portion for preventing back flow of vapor is provided so that a working fluid is caused to flow in a predetermined direction.

As a method of storing a fluid within the fluid reservoir portion, there are proposed a method in which there is provided, within a flow path, a valve of a shape memory alloy such that when vapor comes into contact with a valve for attempting to perform back flow, the valve is warmed to be closed, and a method in which there is provided a filter to absorb condensed fluid by a capillary force.

Moreover, when an attempt is made to reduce the size of a heat pipe, as the size becomes smaller, the influence of frictional force or surface tension of a pipe path becomes larger than the influence of gravity.

Namely, for reflux, utilizing a capillary force

is advantageous as compared to utilizing a gravity. For example, in D.Liepmann, Proceedings of 2001 ASME International Mechanical Engineering Congress and Exposition November 11-16, New York (2001), a micro- loop heat pipe is produced utilizing semiconductor processing technology. Further, gravity is not used for reflux, acceleration of movement of condensed fluid is realized by means of a wick provided at a vaporizing portion. On the other hand, fuel cells of various types have been studied and developed. Among the fuel cells, a polymer electrolyte fuel cell (proton exchange membrane fuel cell) , because of having a relative low operating temperature and using a polymer film electrolyte which is easy to handle, has been widely studied and developed as an automotive or residential power generator.

Moreover, for the purpose of carrying and using a small-sized electric device, there have been used various primary batteries and secondary batteries.

However, with recent realization of high- performance small-sized electric devices, power consumption becomes large, so that sufficient energy cannot be supplied by means of the primary battery while suppressing increase of the size and weight thereof.

Moreover, the secondary battery can be

advantageously used by repeatedly performing charging operation, whereas the amount of energy which can be used by one charging operation is lesser than that of the primary battery. Further, another power source is required for the purpose of charging a secondary battery. In addition, it generally takes several ten minutes to several hours for one charging operation, so that it is difficult to allow the secondary battery to be immediately used anytime anywhere.

In future, with the increase of the tendency of carrying and using an electric device because of proceed of reduction in size and weight of the electric device and implementation of wireless network environments, it is difficult for conventional primary and secondary batteries to supply an energy sufficient to drive such a device.

As a countermeasure of such problems, attention is drawn to the small-sized fuel cell. The reason why the fuel cell is useful as a drive source for a small-sized electric device is that the amount of energy which can be supplied per unit volume or per unit weight is about several times to ten times that of the conventional batteries. Further, by only exchanging a fuel, the fuel cell can continuously be used, so that there is no problem that it takes much time to perform charging

as is the case with the other secondary batteries.

As such a small-sized fuel cell, a polymer electrolyte fuel cell using hydrogen as a fuel, or a direct methanol fuel cell is mainly used. In ^' a fuel cell for obtaining a large output, it is effective to use hydrogen as a fuel.

However, hydrogen is gaseous at ordinary temperature, and it has been difficult to store hydrogen at a high density in a small fuel tank. In view of the above, when hydrogen is to be used as a fuel, in order to efficiently and safely store hydrogen, there is employed a method of filling a hydrogen storage alloy in a fuel tank and allowing hydrogen to be adsorbed by the alloy. When a hydrogen storage alloy is used, the reaction of releasing hydrogen is generally an endothermic reaction. For example, LaNis known as a hydrogen storage alloy absorbs heat of about 30 kJ when releasing 1 mole of hydrogen . Moreover, the relationship between the temperature T of a hydrogen storage alloy and the hydrogen dissociation pressure P _H 2 is expressed by the following formula called "van't Hoff' s equation:

. _D 2δ//° 1 2AS ⁰ " ² nR T nR

wherein n is number of moles, and R is gas constant,

and in LaNi ₅ , δH° = -30.1 [kJ/mol H ₂ ] and δS° = -108.8 [kJ/mol H ₂ ] . As is seen from the above equation, as the hydrogen is released, the temperature of the fuel tank is lowered, and the pressure inside the tank and the hydrogen release rate are reduced.

Particularly, during power generation of a fuel cell, with proceed of hydrogen release by the power generation, the tank temperature is lowered and the hydrogen release rate is reduced. To the contrary, when the fuel tank is heated, the pressure inside the tank and the hydrogen release rate increase. Accordingly, in order to obtain a sufficient hydrogen release rate and to prevent the tank pressure from excessively increasing, the temperature inside the tank needs to be kept constant On the other hand, power generation of a polymer electrolyte fuel cell is performed in a manner as described below.

As a polymer elecrtolyte membrane, perfluorosulfonic acid cation-exchange resin is frequently used. For example, as such a film, Nafion (trade name; manufactured by DuPont Company) is well known.

A polymer electrolyte membrane is interposed between a pair of porous electrodes each carrying a catalyst such as platinum, i.e., a fuel electrode and an oxidizer electrode to constitute a membrane

electrode assembly as a power generation cell.

An oxidizer is supplied to the oxidizer electrode of the fuel cell, and a fuel is supplied to the fuel electrode, so that protons move within the polymer elecrtolyte membrane to perform power generation.

Such a power generation reaction, when performed within the temperature range of about 60°C to about 100°C is most effective. However, the polymer electrolyte membrane has such a property that when the temperature exceeds 100°C, the power generation performance is remarkably lowered. Moreover, although the polymer electrolyte membrane is generally used in a wet state, water in the polymer elecrtolyte membrane will be vaporized at a temperature of 100°C or more.

Accordingly, it is not preferable that the power generation cell temperature becomes 100°C or more during power generation. The power generation efficiency of a polymer electrolyte fuel cell is about 50%, and heat of an amount which is approximately identical to the power generation amount is produced. Accordingly, in power generation, it is necessary to maintain fuel cell units at a suitable temperature.

In view of the above, in Japanese Patent Application Laid-Open No. 2004-31096, there is

proposed a fuel cell in which heat produced by power generation cell is radiated by using a fuel tank casing.

In this fuel cell, in order to prevent the temperature of the fuel tank from being excessively raised by the heat from the power generation cell, the casing and inside of the tank are separated by a heat insulating member.

Moreover, in Japanese Patent Application Laid- Open No. HOβ-260202, a method is disclosed which performs heat exchange between a fuel cell unit and a fuel tank by using cooling water. Also, in Japanese Patent Application Laid-Open No. H10-064567, a method is disclosed which performs heat exchange between a ' fuel cell unit and a fuel tank by using exhaust gas. Further, as a method of efficiently performing heat exchange directly between a fuel cell unit and a fuel tank without using a medium such as cooling water or exhaust gas, U.S. Pat. No. 6,268,077 discloses a fuel cell system as described below.

In this patent, there is disclosed a fuel cell system which includes a fuel cell having power generation cells disposed in a planar form and a fuel tank, wherein a principal surface of the fuel cell and a principal surface of the fuel tank are in contact with each other.

Moreover, in Japanese Patent Application Laid-

Open No. 2000-353536, there is proposed a fuel cell using a heat pipe for radiation. In this fuel cell, for attaining reflux in which a condensed working fluid is transported to a vaporizing portion again, there is employed a system in which a flow path using a linear heat pipe is directed downwardly to utilize a gravity.

Moreover, the theoretical voltage of one set of membrane electrode assembly is about 1.23V, and there are many cases where the assembly is used at about 0.7 V in ordinary operating state.

For this reason, when a higher voltage is required, or when a high output density is required, there is used a stack structure in which a plurality of fuel cell units are stacked to electrically connect the respective fuel cell units in series.

Such a stack structure is called a fuel cell stack, and generally, in the stack, an anode flow path and a cathode flow path are separated by a member called separator.

Generally, in the fuel cell stack, there is a tendency such that as a cell is positioned closer to the central part, its radiation efficiency becomes poor and its temperature becomes high, and as a cell is positioned closer to the end part, its temperature becomes low.

When a temperature difference is generated

between cells in the stack, a variance in power generation performance is caused depending on the power generation cell units, which is not preferable.

In view of the above, also in Japanese Patent Application Laid-Open No. 2004-31096 mentioned above, there is employed a method in which a member having a high thermal conductivity is used as a member constituting a fuel cell (stack) to thereby prevent heat from residing in the vicinity of the central part of the stack to thereby reduce a temperature difference between fuel cell units.

However, the above-mentioned conventional examples of the loop heat pipe have problems as described below. For example, the loop heat pipe disclosed in

Japanese Patent Application Laid-Open No. H07-332881 is provided with the pump for preventing back flow.

However, when such a fluid machine is provided, the system becomes complicated and large, and the power consumption is increased, which results in disadvantages in realizing size reduction of the system.

Moreover, when the valve made of a shape memory alloy or the fluid reservoir using a filter for absorbing condensed fluid by a capillary force is used as disclosed in Japanese Patent Application Laid-Open No. 2003-148882, the back flow of vapor can

be prevented without using an electric power.

However, because gravity is utilized for reflux of condensed fluid, there is a possibility that when the heat pipe is reduced in size so that the influence of a frictional force becomes large, or when the heat pipe is incorporated into a device whose vertical direction is not determined, the heat pipe does not effectively operate.

Further, the valve made of a shape memory alloy is provided in a flow path of the heat pipe. However, this valve is opened/closed by the temperature of working vapor, and cannot be controlled according to the temperature conditions of the outside of the pipe, Furthermore, in the micro-pipe of D. Liepmann, Proceedings of 2001 ASME International Mechanical

Engineering Congress and Exposition November 11-16, New York (2001), no gravity is used for reflux, hastening of movement of condensed fluid can be realized by the wicks provided at a vaporizing portion. However, a mechanism for preventing back- flow is not incorporated. In addition, heat quantity transported cannot be controlled.

Further, the above-mentioned examples of the conventional fuel cell system have problems as described below. For example, the fuel cell of

Japanese Patent Application Laid-Open No. 2004-31096 can prevent the temperature elevation of the fuel

cell, but does not effectively function with respect to lowering of the temperature inside the fuel tank.

Furthermore, since heat transfer is performed mainly by heat conduction in a solid, when the heat generation amount is large, or when the heat transport distance is large, there is a possibility that the heat transportability may become insufficient.

Further, in the fuel cells of Japanese Patent Application Laid-Open Nos. H06-260202 and H10-064567, when heat exchange is performed between the fuel cell unit and the fuel tank, a circulating device for cooling water or exhaust gas is required, which may result in size increase of the system and lowering of the energy utilization efficiency of the entire system.

The fuel cell disclosed in U.S. Pat. No. 6,268,077 does not require a special system for heat exchange, but the heat exchange amount is determined by the area of the fuel cell principal surface so that it is difficult to optimally control the heat exchange quantity depending on the temperature.

In addition, in Japanese Patent Application Laid-Open No. 2000-353536, for attaining reflux in which a condensed working fluid is transported to a vaporizing portion again, there is employed a system in which a flow path using a linear heat pipe is

directed downwardly to utilize a gravity.

Accordingly, when such a linear heat pipe utilizing gravity while being directed downwardly is used for a fuel cell whose vertical direction is not determined in a use state, there is a possibility that the heat pipe may not effectively operate.

DISCLOSURE OF THE INVENTION

The present invention is directed to a heat transfer controlling mechanism which permits a working fluid to flow in a predetermined direction in a loop-shaped flow path without causing back flow with a simple structure, which has no restriction resulting from the orientation in a use state, and which has low power consumption and can realize efficient heat transfer and size reduction.

Moreover, the present invention is directed to a fuel cell system which has the heat transfer controlling mechanism of the present invention mounted thereon to thereby have the ability, in addition to the function of the heat transfer controlling mechanism, of maintaining the temperatures of a fuel cell power generation unit and a fuel tank at suitable temperatures. In order to solve the above-mentioned problems, the present invention provides a heat transfer controlling mechanism configured as below and a fuel

cell system having such a heat transfer controlling mechanism mounted thereon.

The heat transfer controlling mechanism of the present invention includes: a vaporizing portion; a condensing portion; and a loop-shaped flow path connecting the vaporizing portion and the condensing portion such that a working fluid is sealed therein, the heat transfer controlling mechanism serving to perform heat transport by actions of vaporization of the working fluid in the vaporizing portion and condensation of the working fluid in the condensing portion to thereby control heat transfer, the heat transfer controlling mechanism further including : a gas passage suppressing portion provided on one side in the loop-shape flow path, for allowing a liquid to pass therethrough and suppressing passage of a gas; and a liquid passage suppressing portion provided on the other side in the loop-shaped flow path, for allowing a gas to pass therethrough and suppressing passage of a liquid.

Further, the heat transfer controlling mechanism of the present invention is characterized in that the gas passage suppressing portion is formed of a member having hydrophilicity provided in a surface of the flow path.

Moreover, the heat transfer controlling mechanism of the present invention is characterized in that the liquid passage suppressing portion is formed of a member having hydrophobicity provided in a surface of the flow path.

Further, the heat transfer controlling mechanism of the present invention is characterized in that at least one of the gas passage suppressing portion and the liquid passage suppressing portion comprises a wettability changing portion comprising a material whose contact angle is changed at a predetermined temperature .

Moreover, the heat transfer controlling mechanism of the present invention is characterized in that the wettability changing portion includes a material whose property changes from hydrophilicity to hydrophobicity at a predetermined temperature or more .

Further, the heat transfer controlling mechanism of the present invention is characterized by including a heat transfer controlling member adjacent to at least one of the vaporizing portion and the condensing portion, for changing the amount of heat transport by the actions of vaporization and condensation of the working fluid depending on a temperature state of the vaporizing portion or the condensing portion.

Moreover, the heat transfer controlling mechanism of the present invention is characterized in that the heat transfer controlling member is provided adjacent to the vaporizing portion or the condensing portion and changes a flow path resistance of the loop-shaped flow path depending on the temperature of the vaporizing portion or the condensing portion.

Further, the heat transfer controlling mechanism of the present invention is characterized in that the heat transfer controlling member is formed of a bimetal or a shape memory alloy.

Moreover, the heat transfer controlling mechanism of the present invention is characterized in that the heat transfer controlling member is formed of a material which undergoes phase transition depending on temperature to change the volume thereof,

In addition, the fuel cell system of the present invention includes: a fuel tank; a fuel cell unit for performing power generation using a fuel . supplied from the fuel tank; and the above-mentioned heat transfer controlling mechanism provided between the fuel tank and the fuel cell unit, wherein the condensing portion is disposed on the fuel tank side and the vaporizing portion is disposed on the fuel cell unit side.

Furthermore, the fuel cell system of the present

invention includes: a fuel tank; a fuel cell unit for performing power generation using a fuel supplied from the fuel tank; and the above-mentioned heat transfer controlling mechanism provided between the fuel tank and the fuel cell unit, wherein the fuel cell unit and a radiating plate having an air hole for supplying air are connected through a wettability changing portion whose contact angle changes at a predetermined temperature or through a heat transfer member having a thermal junction which operates at a predetermined temperature or more, and wherein the thermal junction includes a heat transfer controlling member in the heat transfer controlling mechanism. Moreover, the fuel cell system of the present invention is characterized by further including a water flow path for guiding water produced by power generation in the fuel cell unit to the radiating plate .

Further, the fuel system of the present invention is characterized in that a pattern including a hydrophilic portion and a hydrophobic portion is formed on a surface of the water flow path.

Moreover, the fuel cell system of the present invention is characterized in that a water absorbing member is provided on a surface of the radiating plate.

Further, the fuel cell system of the present

invention is characterized in that the water absorbing member includes a member whose air permeation rate increases with increase of absorbed water amount. Still further, the fuel cell system of the present invention includes a heat spreader for uniformizing a variance of heat produced by power generation in a fuel cell unit, wherein the heat spreader includes the above-mentioned heat transfer controlling mechanism.

Moreover, the fuel cell system of the present invention is characterized in that the heat spreader also serves as at least one of the above-mentioned heat transfer controlling mechanism provided between the fuel cell unit and the fuel tank and the above- mentioned heat spreader.

According to the present invention, it is possible to realize a heat transfer controlling mechanism which allows a working fluid to flow in a predetermined direction in a loop-shaped flow path without causing back flow with a simple structure, which has no restriction in the orientation thereof in a use state, which has low power consumption, and which can realize efficient heat transfer and size reduction. Further, by mounting the heat transfer controlling mechanism of the present invention, a fuel cell system can be realized which, in addition

to the functions of the heat transfer controlling mechanism, can maintain the temperatures of the fuel cell power generation unit and the fuel tank at suitable temperatures. Further features of the present invention will become apparent from the following description of exemplary embodiments with reference to the attached drawings .

BRIEF DESCRIPTION OF THE DRAWING

FIG. 1 is a diagram illustrating the configuration of a loop heat pipe according to Embodiment 1 of the present invention;

FIG. 2 is a diagram illustrating a configuration example in which the position of a wettability changing portion of the loop heat pipe of Embodiment 1 of the present invention is changed;

FIG. 3 is a table collectively illustrating the case where the position of the wettability changing portion of the loop heat pipe of Embodiment 1 of the present invention is changed;

FIG. 4 is a diagram illustrating a configuration example in which a reservoir of the loop heat pipe of Embodiment 1 of the present invention is provided; FIG. 5 is a diagram illustrating a configuration example in which the reservoir of the loop heat pipe of Embodiment 1 of the present invention is integral

with a vaporizing portion;

FIGS. 6A and 6B are diagrams illustrating a configuration example in which a wick is provided at the vaporizing portion and a liquid flow path of the loop heat pipe of Embodiment 1 of the present invention;

FIG. 7 is a diagram illustrating the configuration of a loop heat pipe according to Embodiment 2 of the present invention; FIGS. 8A and 8B are diagrams respectively illustrating a configuration example of a member displaced depending on the temperature of the loop heat pipe of Embodiment 2 of the present invention, wherein FIG. 8A illustrates a configuration including a bimetal 202, and FIG. 8B illustrates a configuration in which a member (phase transition member) 204 is deformed by the volume change thereof owing to the phase transition (liquefaction or vaporization) depending on the temperature of the loop heat pipe;

FIGS. 9A, 9B, 9C, 9D, and 9E are views illustrating a first production method of producing the loop heat pipe of Embodiment 1 in Example 1 of the present invention; FIG. 10 is a plan view of a loop heat pipe produced by the first production method of Example 1 of the present invention;

FIGS. HA, HB, HC, HD, HE, HF, HG, HH, and HI are views illustrating a production method of a loop heat pipe of Example 2 of the present invention; FIG. 12 is a perspective view of the loop heat pipe of Example 2;

FIGS. 13A, 13B, 13C, 13D, 13E, 13F, 13G, 13H, and 131 are views illustrating a production method of a loop heat pipe of Example 3 of the present invention;

FIG. 14 is a perspective view illustrating the configuration of the loop heat pipe of Example 3 of the present invention;

FIGS. 15A, 15B, 15C, 15D, 15E, 15F, 15G, and 15H are views illustrating a production method of a loop heat pipe of Example 4 of the present invention;

FIG. 16 is a plan view illustrating the loop heat pipe produced by the first production method of Example 4 of the present invention; FIGS. 17A, 17B, 17C, 17D, 17E, 17F, 17G, 17H,

171, 17J, and 17K are views illustrating a production method of a loop heat pipe of Example 5 of the present invention;

FIG. 18 is a cross-sectional view illustrating the configuration of the loop heat pipe of Example 5 of the present invention;

FIG. 19 is a schematic diagram illustrating a

fuel cell system of Example 6 of the present invention;

FIG. 20 is a diagram illustrating the relationship between the temperature of a fuel tank filled with LaNI ₅ of the fuel cell system of Example 6 of the present invention and hydrogen release rate;

FIG. 21 is a diagram illustrating the relationship between the temperature of a fuel tank filled with LaHI ₅ of the fuel cell system of Example 6 of the present invention and hydrogen dissociation pressure;

FIG. 22 is a diagram illustrating a configuration example in which a loop heat pipe is used for heat exchange between a fuel tank and a fuel cell as a heat transfer controlling mechanism of the fuel cell system of Example 6 of the present invention;

FIG. 23 is a diagram illustrating a radiation amount controlling mechanism of a fuel cell system of Example 7 of the present invention;

FIG. 24 is a diagram illustrating a configuration example in which a pattern having hydrophilicity and hydrophobicity is formed to enable movement of water in Example 7 of the present invention;

FIG. 25 is a diagram illustrating a configuration example in which the air permeation

rate of air holes is changed by absorbed water amount in Example 7 of the present invention;

FIG. 26 is a diagram illustrating a configuration example in which a thermal switch is used for the loop heat pipe in Example 7 of the present invention;

FIG. 27 is a diagram illustrating a radiation amount controlling mechanism of a fuel cell system of Example 8 of the present invention; FIG. 28 is a perspective view illustrating a configuration example in which a mesh having a capillary force or the like is put into a hollow heat spreader and a working fluid is sealed therein to provide a heat pipe in Example 8 of the present invention;

FIG. 29 is a diagram illustrating a configuration example in which air holes are provided in a heat spreader so that the heat spreader is used as a radiating plate in Example 8 of the present invention;

FIG. 30 is a diagram illustrating a configuration example in which the loop heat pipe of Example 3 is used as a heat spreader in Example 8 of the present invention; FIG. 31 is a diagram illustrating a configuration example in which a heat spreader is provided between a fuel cell and a fuel tank in

Example 8 of the present invention;

FIG. 32 is a diagram illustrating a configuration example in which only when the temperature of a fuel cell becomes a predetermined temperature or more, heat is transferred to a fuel tank in Example 8 of the present invention; and

FIG. 33 is a diagram illustrating a configuration example in which only when the temperature of a fuel tank becomes less than a predetermined temperature, heat is transferred to a fuel tank in Example 8 of the present invention.

BEST MODES FOR CARRYING OUT THE INVENTION

Embodiments of the present invention will now be described.

In this embodiment, as a heat transfer controlling mechanism, a loop heat pipe is constructed as described below.

Namely, the loop heat pipe of this embodiment includes a vaporizing portion, a condensing portion, and a loop-shaped flow path connecting the vaporizing portion and the condensing portion, a working fluid being sealed in the loop-shaped flow path. Heat transfer is performed by the action of vaporization of the working fluid at the vaporizing portion and by the action of condensation of the working fluid at the condensing portion. Further, the flow path has a

gas passage suppressing portion provided on one side thereof, for allowing a liquid to pass therethrough and suppressing passage of a gas and a liquid passage suppressing portion provided on the other side thereof, for allowing a gas to pass therethrough and suppressing passage of a liquid.

In this instance, there may be employed a configuration including a heat transfer controlling member for changing the heat transport amount of the heat pipe depending on the temperature state of at least one of the vaporizing portion and the condensing portion.

According to the above-described configuration, the working fluid can be surely flowed in the loop- shaped flow path in a predetermined direction without causing back flow with the simple configuration.

In addition, the circulation flow rate within the loop-shaped flow path of the working fluid can be controlled depending on the temperature of the vaporizing portion or the condensing portion by means of the heat transfer controlling member. Particularly, passive control hardly using an electric power or the like can be performed.

Based on configuration examples of Embodiments 1 and 2, further detailed configuration of the loop heat pipe will now be described. (Embodiment 1)

The configuration of a loop heat pipe of Embodiment 1 of the present invention will be described.

FIG. 1 is a schematic diagram illustrating the configuration of the loop heat pipe of Embodiment 1. In FIG. 1, reference numeral 101 denotes a high temperature portion, 102 a low temperature portion, 103 a vaporizing portion, 104 a condensing portion, 105 a vapor flow path, 106 a liquid flow path, 107 a hydrophobic portion, and 109 a wettability changing portion. In the loop heat pipe of this embodiment, the vaporizing portion 103 is provided in contact with the high temperature portion 101, the condensing portion 104 is provided in contact with the low temperature portion, and a loop-shaped flow path is provided between the vaporizing portion 103 and the condensing portion 104.

One side of the loop-shaped flow path is the vapor flow path 105, and the other side thereof is the liquid flow path 106. The vapor flow path 105 is provided with a portion which permits passage of a gas but prevents passage of a liquid. Such a portion is constituted by making the surface of a porous flow path or a small width flow path hydrophobic (hydrophobic portion 107).

Moreover, in the vicinity of the low temperature portion 102 in the liquid flow path 106, there is

provided a portion which, when the temperature is less than a predetermined temperature, exhibits hydrophilicity to permit passage of a liquid but prevent passage of a gas, while when the temperature is the predetermined temperature or more, exhibits hydrophobicity to permit passage of a gas but prevent passage of a liquid.

Such a portion is constituted by, for example, providing in the liquid flow path a member whose contact angle increases (or which becomes hydrophobic) when the temperature exceeds a predetermined temperature (wettability changing portion 109) .

Specifically, the wettability changing portion is a porous flow path or a small width flow path.

Further, the wettability changing portion 109 can be formed by modifying the surface of the flow path by PNIPAAm (poly-N-isoporopylacrylamide) , or PNIPAAm-ODS (octadodecylsilane) formed on glass. As a material which changes its property between hydrophilicity and hydrophobicity depending on temperature, materials as described below are known.

For example, in T. Saitoh et al . , Analytica Chimica Acta, 536, pp. 179 - 182 (2005), there are disclosed materials which change their property between hydrophilicity and hydrophobicity.

In this document, it is shown that the contact

angle is about 30° in the vicinity of 25°C in PNIPAAm (poly N-isoporopylacrylamide) formed on frosted glass, or PNIPAAm - ODS (octadodecylsilane) , whereas the contact angle changes to 60° to 70° at 4O ⁰ C. In this case, a working fluid is sealed within a flow path. Although the kind of the working fluid is selected depending on the operating temperature, water is suitable at or near ordinary temperature. The operation of the loop heat pipe in this embodiment will now be described.

First, when the temperature of the high temperature portion is elevated by generation ^' of heat, a working fluid is vaporized at the vaporizing portion 103. The vaporized working fluid passes through the hydrophobic portion 107, and is condensed at the condensing portion 104 to become liquid.

On the other hand, the condensed working fluid cannot pass through the hydrophobic portion 107. At this time, if the temperature of the condensing portion 104 is less than a predetermined temperature (30°C to 35°C) , the wettability changing portion 109 in the liquid flow path 106 exhibits hydrophilicity to allow the fluid to pass therethrough, so that the condensed working fluid moves in the liquid flow path 106 to return to the vaporizing portion 103 again.

At this time, the vapor in the vaporizing portion 103 cannot pass through the wettability changing portion 109 in the liquid flow path 106 and therefore will not flow backward in the liquid flow path 106.

On the other hand, when the temperature of the low temperature portion becomes a predetermined temperature (30°C to 35°C) or more, the wettability changing portion 109 exhibits hydrophobicity to prevent passage of a fluid, so that the condensed working fluid cannot reflow to the liquid flow path 106, whereby the heat pipe does not transport heat.

As described above, in the heat pipe of the configuration shown in FIG. 1, when the low temperature portion is at a temperature less than a predetermined temperature, heat is transferred, while when the low temperature portion is at the predetermined temperature or more, heat becomes difficult to be transferred. Moreover, the wettability changing portion may be provided at a position different from that shown in FIG. 1.

FIG. 2 illustrates a configuration example in which the position of the wettability changing portion 109 is changed. In FIG. 2, the wettability changing portion 109 is provided in the vapor flow path 105, and the liquid flow path 106 is provided

with a portion which permits passage of a liquid but prevents passage of a gas (hydrophilic portion 108) . Such hydrophilic portion 108 can be constituted by making the surface of a porous flow path or a small width flow path hydrophilic.

By adopting the configuration of the heat pipe such as illustrated in FIG. 2, when the high temperature portion is at a predetermined temperature or more, the wettability changing portion 109 becomes hydrophobic so that the gas flows to transfer heat. On the other hand, when the high temperature portion is at a temperature less than the predetermined temperature, the wettability changing portion 109 becomes hydrophilic so that the gas cannot flow to fail to transfer heat.

As described above, by changing the position of the wettability changing portion 109, the condition for transfer of heat can be determined.

FIG. 3 represents a table collectively showing the cases where the position of the wettability changing portion is changed.

In FIG. 3, in the respective cases, when the flow path on the side where no wettability changing portion 109 is provided is the vapor flow path 105, the hydrophobic portion 107 is also provided thereat. When the flow path on the side where no wettability changing portion 109 is the liquid flow path 106, the

hydrophilic portion 108 is also provided thereat.

Moreover, in order that the flow rate of the working fluid is kept in an optimum state and the working fluid is not entirely evaporated by heat (dry-out) , a reservoir 110 such as shown in FIG. 4 may be provided. Further, as shown in FIG. 5, the reservoir 110 may be integrated with the vaporizing portion 103. Further, in order to improve the flow of the condensed working fluid, a wick 111 may be provided at the vaporizing portion 103 and the liguid flow path 106 as shown in FIG. 6, the flow path may be made porous, or the flow path may be made small in width.

In addition, the hydrophilic portion 108, the hydrophobic portion 107, and the wettability changing portion 109 may be provided at either a portion or the whole of each of the flow paths. Particularly, the hydrophilic portion has a capillary force and is therefore effective for accelerating the reflux. (Embodiment 2)

The configuration of a loop heat pipe of Embodiment 2 of the present invention will be described.

FIG. 7 is a schematic diagram illustrating the configuration of the loop heat pipe of Embodiment 2. In FIG. 7, the elements which are the same as those described in Embodiment 1 are identified by like

numerals, so that description of common portions will be omitted.

In FIG. 7, reference numeral 108 denotes a hydrophilic portion, and reference numeral 201 denotes a member which is displaced depending on temperature .

In the loop heat pipe of this embodiment, a vaporizing portion 103 is provided in contact with the high temperature portion 101, and a condensing portion 104 is provided in contact with the lower temperature portion 102, and a loop-shaped flow path is provided between the vaporizing portion 103 and the condensing portion 104.

One side of the loop-shaped flow path is a vapor flow path 105, and the other side is a liquid flow path 106. The vapor flow path 105 is provided with a portion through which gas can pass but fluid cannot pass. Such a portion is constituted by making the surface of a porous flow path or a small width flow path hydrophobic (hydrophobic portion 107).

On the other hand, the liquid flow path 106 is provided with a portion through which fluid can pass but gas cannot pass.

Such a portion can be constituted by making the surface of a porous flow path or a small width flow path hydrophilic (hydrophilic portion 108).

Further, the member 201 which is displaced

depending on temperature to change the flow rate of working fluid is formed in the flow path.

As a configuration example with such a member, there may be employed a configuration having a bimetal structure as shown in FIG. 8A, or there may be employed a configuration in which the member is made of a material having a large thermal expansion coefficient or a shape memory alloy to perform displacement depending on temperature. Moreover, there may be employed, as shown in FIG. 8B, a configuration in which the member is deformed by the volume change thereof owing to the phase transition (liquefaction or vaporization) depending on temperature. Further, such a displacement may be a displacement configuration to change a flow path cross section, or may be a ^' configuration including a plurality of micro flaps to change the mode of flow of the fluid (laminar flow, turbulent flow) . In addition, the temperature at which the displacement is performed, or whether the flow rate is to be increased or decreased when the displacement is performed can be selected by design.

The operation of the heat pipe of this embodiment when the member 201 displaced depending on temperature is provided adjacent to the lower temperature portion will be described.

First, when the temperature of the high temperature portion is elevated by heat generation, the working fluid is vaporized at the vaporizing portion 103. The vaporized working fluid passes through the hydrophobic portion 107, and is condensed at the condensing portion 104 to become liquid. The condensed working fluid cannot pass through the hydrophobic portion 107 and passes through the hydrophilic portion 108 in the liquid flow path to return to the vaporizing portion 103 again.

In this case, when the temperature reaches a set temperature, the member 201 which is displaced according to temperature to change the flow rate of the working fluid is brought into a closed state. Thus, the working fluid cannot reflow, whereby the heat pipe stops its function.

In addition, similarly to Embodiment 1, a reservoir may be provided to prevent dry out, or reflux may be accelerated by provision of a wick. (Examples)

Examples of the present invention will now be described. (Example 1)

In Example 1, a first production method of a loop heat pipe of Embodiment 1 will be described.

Although in this example description will be made by taking as an example a case where the

semiconductor processing technology is mainly used, the heat pipe may be produced by using the mechanical processing technology such as cutting or pressing.

FIGS. 9A to 9E are views illustrating a first production method of producing a loop-type heat pump of Embodiment 1.

In FIGS. 9A to 9E, the elements which are the same as those described in Embodiment 1 with reference to FIG. 1 are identified by like numerals, so that description of common portions will be omitted.

In FIGS. 9A to 9E, reference numeral 301 denotes a substrate-1, 302 a substrate-2, 304 an injection port, 305 a porous portion, 306 a working fluid, and 307 a sealing agent.

In the production method of the loop heat pipe of this example, FIG. 9A shows a step of forming flow paths 105, 106 in the substrate-1 (301) .

As the substrate, a silicon wafer may be used. The thickness of the silicon wafer is, e.g., 525 μm. Although when ICP-RIE is used in an etching step, there is no restriction in plane orientation, but when anisotropic wet etching is used, it is desirable to use a silicon wafer having (100) plane as the surface.

Moreover, when anodization is used for porousifying a portion of the flow path in a

subsequent step, p-type silicon is used as the substrate .

A photoresist is coated and patterning is then performed by photolithography. With the patterned photoresist as a mask, flow paths are formed by ICP- RIE, or anisotropic wet etching.

The etching depth is about 300 μm. At this time, a wick 111 for accelerating reflux may be provided. Moreover, an injection port 304 for injecting the working fluid is also provided.

As the etching, patterning may be performed onto the rear surface by using a similar method to perform etching, or a mask of the front surface may be formed of a two-step mask and two-stage etching may be performed.

As a mask, silicon oxide or aluminum may be used instead of a photoresist having a large film thickness .

FIG. 9B illustrates a step of forming a porous portion 305.

Here, a mask is prepared in advance by use of a photoresist and anodization in which a voltage is applied in a hydrofluoric acid solution is performed to porousify a portion of the substrate. Moreover, in place of porousification, a fine flow path may be formed by etching.

FIG. 9C illustrates a step of performing surface

treatment .

As the method of making a surface hydrophilic, there are used a method of oxidizing a silicon surface, a method of forming a film of titanium oxide on a surface, and the like.

On the other hand, for making a surface hydrophobic, there is a method of applying a silane coupling agent or the like onto a surface.

Moreover, by modifying a surface by PNIPAAm (poly-N-isoporopylacrylamide) or PNIPAAmODS

(octadodecylsilane) , it can be realized that the wettability changes at a predetermined temperature.

FIG. 9D illustrates a bonding step.

As the substrate-2 (302) to be bonded, a silicon wafer, a Pyrex (trade name) glass sheet or the like may be used.

In the case of a silicon wafer, diffusion bonding may be used. In the case of Pyrex (trade name) glass, anodic bonding may be used. It is to be noted that in a case where the surface treated in the preceding surface treatment step is changed, adhesion with an adhesive may be performed.

FIG. 9E illustrates a step of injecting a working fluid and sealing the working fluid.

After the working fluid is injected, sealing is performed. The injection is preferably performed in

vacuum. The sealing is performed by an adhesive or the like.

By the above-described steps, the loop heat pipe described in Embodiment 1 can be produced. FIG. 10 is a plan view of the loop heat pipe manufactured by the above-described steps. (Example 2)

In Example 2, a second production method of producing the loop heat pipe of Embodiment 1 will be described.

FIG. 12 is a perspective view of the loop heat pipe of this example. In the loop heat pipe of this example, a vapor flow path and a liquid flow path are respectively provided in different layers with a heat insulating layer 310 therebetween.

By this configuration, it is possible to widen the respective flow paths without increasing the area of the heat transfer controlling mechanism, so that the heat transfer amount can be increased. Although in this example description will be made by taking as an example a case where the semiconductor processing technology is mainly used, the heat pipe may be produced by using the mechanical processing technology such as cutting or pressing. FIGS. HA to HI are views illustrating a second production method for producing the loop heat pipe of Embodiment 1. In FIGS. HA to HI, the elements which

are the same as those described in Embodiment 1 with reference to FIGS. 9A to 9E are identified by like numerals, so that description of common portions will be omitted. In the production method of the loop heat pipe of this example, FIG. HA illustrates a step of forming a vapor flow path 105 in a substrate-1 (301) . As the substrate, a silicon wafer may be used.

The thickness of the silicon wafer is, e.g., 525 μm. Although when ICP-RIE is used in an etching step, there is no restriction in plane orientation, but when anisotropic wet etching is used, it is desirable to use a silicon wafer having (100) plane as the surface . Moreover, when anodization is used for porousifying a portion of the flow path in a subseguent step, p-type silicon is used as the substrate .

A photoresist is coated and patterning is then performed by photolithography. With the patterned photoresist as a mask, flow paths are formed by ICP-

RIE, or anisotropic wet etching.

The etching depth is about 300 μm. At this time, a wick 111 for accelerating reflux may be provided. Moreover, an injection port 304 for injecting the working fluid is also provided.

As the etching, patterning may be performed onto

the rear surface by using a similar method to perform etching, or a mask of the front surface may be formed of a two-step mask and two-stage etching may be performed. As a mask, silicon oxide or aluminum may be used instead of a photoresist having a large film thickness .

FIG. HB illustrates a step of forming a porous portion 305. Here, a mask is prepared in advance by use of a photoresist and anodization in which a voltage is applied in a hydrofluoric acid solution is performed to porousify a portion of the substrate.

Moreover, in place of porousification, a fine flow path may be formed by etching.

FIG. HC illustrates a step of performing surface treatment.

As the method of making a surface hydrophilic, there are used a method of oxidizing a silicon surface, a method of forming a film of titanium oxide on a surface, and the like.

On the other hand, for making a surface hydrophobic, there is a method of applying a silane coupling agent or the like onto a surface. Moreover, by modifying a surface by PNIPAAm (poly-N-isoporopylacrylamide) or PNIPAAmODS (octadodecylsilane) , it can be realized that the

wettability changes at a predetermined temperature.

FIG. HD illustrates a step of forming a liquid flow path 106 in a substrate-2 (302) . The procedure of this step is similar to that of the first step illustrated in FIG. HA.

Moreover, FIG. HE illustrates a step of forming a porous portion 305. The procedure of this step is similar to the second step of FIG. HB.

Further, FIG. HF illustrates a step of performing surface treatment. The procedure of this step is similar to the third step illustrated in FIG. HC.

FIG. HG illustrates a step of forming a vaporizing portion 103 and a condensing portion 104 in a substrate-3 (303) .

As the substrate, a substrate having heat insulating property is desired. It is desirable to use a surface oxidized or nitrided silicon wafer, or glass wafer. A substrate having both surfaces polished and having a thickness of, e.g., 525 μm may be used. When ICP-RIE is used for etching step, there is no restriction in plane orientation. However, when anisotropic wet etching is used, a silicon wafer having (100) plane as the surface can be employed.

A photoresist is coated and patterning is performed by photolithography.

With the patterned photoresist being used as a mask, in the case of a silicon wafer, a flow path is formed by ICP-RIE or anisotropic wet etching. In the case of a glass wafer, a flow path is formed by wet etching using hydrofluoric acid.

At this time, a wick 111 for accelerating reflux may be provided.

FIG. HH illustrates a bonding step. When the substrate-3 (303) is a silicon wafer, diffusion bonding may be used. In the case of Pyrex (trade name) glass, anodic bonding may be used.

It is to be noted that in a case where the surface treated in the preceding surface treatment step is changed, adhesion with an adhesive may be performed.

FIG. HI illustrates a step of injecting a working fluid and sealing the working fluid. After the working fluid is injected, sealing is performed. The injection is preferably performed in vacuum. The sealing is performed by an adhesive or the like.

By the above-described steps, the loop heat pipe described in Embodiment 1 can be produced. (Example 3)

In Example 3, a third production method of producing the loop heat pipe of Embodiment 1 will be described.

FIG. 14 is a perspective view of the loop heat

pipe of this example. In the loop heat pipe of this example, a vapor flow path and a liquid flow path are respectively provided in different layers with a heat insulating layer 310 being interposed therebetween. The loop heat pipe of this embodiment is suitable when the vaporizing portion and the condensing portion each have a large area and can realize a heat transfer mechanism having a heat spreading effect for a broad surface. Although in this example description will be made by taking as an example a case where the semiconductor processing technology is mainly used, the heat pipe may be produced by using the mechanical processing technology such as cutting or pressing. FIGS. 13A to 131 are views illustrating a third production method of producing the loop heat pipe of Embodiment 1. In FIGS. 13A to 131, the elements which are the same as those described in Embodiment 2 with reference to FIGS. HA to HI are identified by like numerals, so that description of common portions will be omitted.

In FIGS. 13G to 131, reference numeral 303 indicates substrate-3.

In the production method for loop heat pipe of this example, FIG. 13A illustrates a process step of forming vaporizing portion 103 on a substrate 1 (301) As the substrate, a silicon wafer may be used.

The thickness of the silicon wafer is, e.g., 525 μm. Although when ICP-RIE is used in an etching step, there is no restriction in plane orientation, but when anisotropic wet etching is used, it is desirable to use a silicon wafer having (100) plane as the surface .

Moreover, when anodization is used for porousifying a portion of the flow path in a subsequent step, p-type silicon is used as the substrate.

A photoresist is coated and patterning is then performed by photolithography. With the patterned photoresist as a mask, flow paths are formed by ICP- RIE, or anisotropic wet etching. The etching depth is about 300 μm. At this time, a wick 111 for accelerating reflux may be provided. Moreover, an injection port 304 for injecting the working fluid is also provided.

As the etching, patterning may be performed onto the rear surface by using a similar method to perform etching, or a mask of the front surface may be formed of a two-step mask and two-stage etching may be performed.

As a mask, silicon oxide or aluminum may be used instead of a photoresist having a large film thickness .

FIG. 13B illustrates a step of forming a porous

portion 305 .

Here, a mask is prepared in advance by use of a photoresist and anodization in which a voltage is applied in a hydrofluoric acid solution is performed to porousify a portion of the substrate.

Moreover, in place of porousification, a fine flow path may be formed by etching.

FIG. 13C illustrates a step of performing surface treatment. As the method of making a surface hydrophilic, there are used a method of oxidizing a silicon surface, a method of forming a film of titanium oxide on a surface, and the like.

On the other hand, for making a surface hydrophobic, there is a method of applying a silane coupling agent or the like onto a surface.

Moreover, by modifying a surface by PNIPAAm (poly-N-isoporopylacrylamide) or PNIPAAmODS (octadodecylsilane) , it can be realized that the wettability changes at a predetermined temperature.

FIG. 13D illustrates a step of forming a liquid flow path 106 in a substrate-2 (302) . The procedure of this step is similar to that of the first step illustrated in FIG. 13A. Moreover, FIG. 13E illustrates a step of forming a porous portion 305. The procedure of this step is similar to the second step of FIG. 13B.

Further, FIG. 13F illustrates a step Of performing surface treatment. The procedure of this step is similar to the third step illustrated in FIG. 13C. FIG. 13G illustrates a step of forming a vaporizing portion 103 and a condensing portion 104 in a substrate-3 (303) .

As the substrate, a substrate having heat insulating property is desired. It is desirable to use a surface oxidized or nitrided silicon wafer, or glass wafer.

A substrate having both surfaces polished and having a thickness of, e.g., 525 μm may be used. When ICP-RIE is used for etching step, there is no restriction in plane orientation. However, when anisotropic wet etching is used, a silicon wafer having (100) plane as the surface can be employed.

A photoresist is coated and patterning is performed by photolithography. With the patterned photoresist being used as a mask, in the case of a silicon wafer, a flow path is formed by ICP-RIE or anisotropic wet etching. In the case of a glass wafer, a flow path is formed by wet etching using hydrofluoric acid. At this time, a wick 111 for accelerating reflux may be provided.

FIG. 13H illustrates a bonding step. When the

substrate-3 (303) is a silicon wafer, diffusion bonding may be used. In the case of Pyrex (trade name) glass, anodic bonding may be used.

It is to be noted that in a case where the surface treated in the preceding surface treatment step is changed, adhesion with an adhesive may be performed.

FIG. 131 illustrates a step of injecting a working fluid and sealing the working fluid. After the working fluid is injected, sealing is performed. The injection is preferably performed in vacuum. The sealing is performed by an adhesive or the like.

By the above-described steps, the loop heat pipe described in Embodiment 1 can be produced. (Example 4)

In Example 4, a first production method of producing the loop heat pipe of Embodiment 2 will be described.

The heat transfer controlling member in this example is based on phase transition (phase change) of a displacement member. Although in this example description will be made by taking as an example a case where the semiconductor processing technology is mainly used, the heat pipe may be produced by using the mechanical processing technology such as cutting or pressing.

FIGS. 15A to 15H are views illustrating the

first production method of producing the loop heat pipe of Embodiment 2 in this example.

In FIGS. 15A to 15H, the elements which are the same as those described in Example 1 are identified by like numerals, so that description of common portions will be omitted.

In FIGS. 15A to 15H, reference numeral 203 denotes a diaphragm, and reference numeral 204 denotes a phase transition member. In the production method for the loop heat pipe of this example, FIG. 15A illustrates a step of forming flow paths 105, 106 in a substrate-1 (301) .

As the substrate, a silicon wafer may be used.

The thickness of the silicon wafer is, e.g., 525 μm. Although when ICP-RIE is used in an etching step, there is no restriction in plane orientation, but when anisotropic wet etching is used, it is desirable to use a silicon wafer having (100) plane as the surface . Moreover, when anodization is used for porousifying a portion of the flow path in a subsequent step, p-type silicon is used as the substrate.

A photoresist is coated and patterning is then performed by photolithography. With the patterned photoresist as a mask, flow paths are formed by ICP-

RIE, or anisotropic wet etching.

The etching depth is about 300 μm. At this time, a wick 111 for accelerating reflux may be provided. Moreover, an injection port 304 for injecting the working fluid is also provided. As the etching, patterning may be performed onto the rear surface by using a similar method to perform etching, or a mask of the front surface may be formed of a two-step mask and two-stage etching may be performed. As a mask, silicon oxide or aluminum may be used instead of a photoresist having a large film thickness .

FIG. 15B illustrates a step of forming a porous portion 305. Here, a mask is prepared in advance by use of a photoresist and anodization in which a voltage is applied in a hydrofluoric acid solution is performed to porousify a portion of the substrate.

Moreover, in place of porousification, a fine flow path may be formed by etching.

FIG. 15C illustrates a step of performing surface treatment.

As the method of making a surface hydrophilic, there are used a method of oxidizing a silicon surface, a method of forming a film of titanium oxide on a surface, and the like.

On the other hand, for making a surface

hydrophobic, there is a method of applying a silane coupling agent or the like onto a surface.

FIG. 15D illustrates a step of forming a diaphragm for displacement on a substrate-2 (302) . As the substrate 302, a silicon wafer or glass wafer may be used. As the diaphragm, e.g., a thin film of parylene may be used. Parylene is vapor deposited on the substrate and etching is performed by using plasma. FIG. 15E illustrates a step of forming a space for injecting a phase transition member therein on the rear surface of the diaphragm.

Patterning is performed by photolithography and the rear surface is etched. In the case of a silicon wafer, etching may be performed by ICP-RIE or anisotropic wet etching. In the case of a glass wafer, etching may be performed by wet etching using hydrofluoric acid.

FIG. 15F illustrates a bonding step. When the substrate-2 (302) to be bonded is a silicon wafer, diffusion bonding may be used. In the case of Pyrex (trade name) glass, anodic bonding may be used.

It is to be noted that when heat is transferred to a vaporized organic film so that the organic film is changed by high temperature, the substrate may be adhered by an adhesive.

FIG. 15G is a step of injecting a working fluid and sealing the working fluid.

After the working fluid has been injected, sealing is performed. The injection is preferably performed in vacuum. The sealing is performed with an adhesive .

FIG. 15H illustrates a step of injecting a phase transition member 204 and sealing the phase transition member 204. As the phase transition member 204, various members may be selected depending on the object desired to act. For example, paraffin or alcohol may be used.

After the phase transition member has been injected, sealing is performed. In this case, the injection is preferably performed in vacuum. The sealing is performed with an adhesive.

By the above-described steps, the loop heat pipe which has been described in Embodiment 2 can be produced. FIG. 16 is a plan view illustrating the loop heat pipe produced in this way. [Example 5]

In Example 5, a second production method of producing the loop heat pipe of Embodiment 2 will be described. In this heat transfer controlling mechanism, a vaporizing portion and a condensing portion are respectively provided at different layers with a heat

insulating layer being interposed therebetween. Further, a heat transfer controlling member of a bimetal is provided.

Although in this example description will be made by taking as an example a case where the semiconductor processing technology is mainly used, the heat pipe may be produced by using the mechanical processing technology such as cutting or pressing.

FIGS. 17A to 17K are views illustrating a second production method of producing the loop heat pipe of Embodiment 2 in this example.

In FIGS. 17A to 17K, the elements which are the same as those described in Example 1 are identified by like numerals, so that description of common portions will be omitted.

In FIGS. 17A to 17K, reference numeral 308 denotes a sacrificial layer, and reference numeral 309 denotes a beam, and reference numeral 310 denotes a heat insulating layer. In the production method of the loop heat pipe of this example, FIG. 17A illustrates a step of forming a vaporizing portion 103 in a substrate-1 (301).

In the production method for loop heat pipe of this example, FIG. 13A illustrates a process step of forming vaporizing portion 103 on a substrate 1 (301) As the substrate, a silicon wafer may be used.

The thickness of the silicon wafer is, e.g., 525 μm. Although when ICP-RIE is used in an etching step, there is no restriction in plane orientation, but when anisotropic wet etching is used, it is desirable to use a silicon wafer having (100) plane as the surface .

Moreover, when anodization is used for porousifying a portion of the flow path in a subsequent step, p-type silicon is used as the substrate.

A photoresist is coated and patterning is then performed by photolithography. With the patterned photoresist as a mask, flow paths are formed by ICP- RIE, or anisotropic wet etching. The etching depth is about 300 μm. At this time, a wick 111 for accelerating reflux may be provided. Moreover, an injection port 304 for injecting the working fluid is also provided.

As the etching, patterning may be performed onto the rear surface by using a similar method to perform etching, or a mask of the front surface may be formed of a two-step mask and two-stage etching may be performed.

As a mask, silicon oxide or aluminum may be used instead of a photoresist having a large film thickness .

FIG. 17B illustrates a step of forming a porous

portion 305.

Here, a mask is prepared in advance by use of a photoresist and anodization in which a voltage is applied in a hydrofluoric acid solution is performed to porousify a portion of the substrate.

Moreover, in place of porousification, a fine flow path may be formed by etching.

FIG. 17C illustrates a step of performing surface treatment. As the method of making a surface hydrophilic, there are used a method of oxidizing a silicon surface, a method of forming a film of titanium oxide on a surface, and the like.

On the other hand, for making a surface hydrophobic, there is a method of applying a silane coupling agent or the like onto a surface.

Moreover, by modifying a surface by PNIPAAm (poly-N-isoporopylacrylamide) or PNIPAAmODS (octadodecylsilane) , it can be realized that the wettability changes at a predetermined temperature.

FIG. 17D illustrates a step of forming a condensing portion 104 in a substrate-2 (302) . The procedure of this step is similar to that of the first step illustrated in FIG. 17A. Moreover, FIG. 17E illustrates a step of forming a porous portion 305. The procedure of this step is similar to the second step of FIG. 17B.

Further, FIG. 17F illustrates a step of performing surface treatment. The procedure of this step is similar to the third step illustrated in FIG. 17C. FIG. 17G illustrates a step of forming a flow path in a substrate-3 (303) .

As the substrate, a substrate having heat insulating property is desired. It is desirable to use a surface oxidized or nitrided silicon wafer, or glass wafer.

A substrate having both surfaces polished and having a thickness of, e.g., 525 μm may be used. When ICP-RIE is used for etching step, there is no restriction in plane orientation. However, when anisotropic wet etching is used, a silicon wafer having (100) plane as the surface can be employed.

A photoresist is coated and patterning is performed by photolithography.

With the patterned photoresist being used as a mask, in the case of a silicon wafer, a flow path is formed by ICP-RIE or anisotropic wet etching. In the case of a glass wafer, a flow path is formed by wet etching using hydrofluoric acid.

FIG. 17H illustrates a step of producing a heat transfer controlling member.

First, Ni is vapor deposited in a thickness of 5 μm as a sacrificial layer 308. When the film

thickness is large, it is also effective to form the film by plating.

An Al film is formed in a thickness of 5 μm as a bimetal lower layer and pattered. For the film formation, sputtering or vacuum vapor deposition may be used.

Moreover, for the patterning, a shadow mask may be used at the time of the film formation, or wet etching may be used after the film formation. As etching, various acids and alkalis may be used, and commonly used mixed liquid of phosphoric acid, nitric acid, and acetic acid may be used.

Next, a silicon film is formed in a thickness of 5 μm as a bimetal upper layer and patterned. For the silicon film formation, sputtering may be used.

Further, for the patterning, a shadow mask may be used at the time of the film formation, or dry etching or wet etching may be used after the film formation. FIG. 171 illustrates a step of etching the sacrificial layer 308.

When Ni as the sacrificial layer is dissolved, a beam 309 is released.

At this time, in order to accelerate etching of the sacrificial layer 308 located below the beam 309, several penetration holes may be provided in the beam 309.

As the etchant, it is necessary to select an etchant such that the upper Al layer is not etched. For example, dilute nitric acid or dilute phosphoric acid may be used. FIG. 17J illustrates a bonding step.

When the substrate-3 (303) is a silicon wafer, diffusion bonding may be used. In the case of Pyrex (trade name) glass, anodic bonding may be used.

It is to be noted that in a case where the surface treated in the preceding surface treatment step is changed, adhesion with an adhesive may be performed.

FIG. 17K illustrates a step of injecting a working fluid and sealing the working fluid. After the working fluid is injected, sealing is performed. The injection is preferably performed in vacuum. The sealing is performed by an adhesive or the like.

By the above-described steps, the loop heat pipe described in Embodiment 2 can be produced. Although in this example the beam structure of the bimetal with the two-layer structure is used as the heat transfer controlling member, if a TiNi alloy is used as the material, such an alloy can be used as a shape memory alloy. Moreover, even with a material of a single layer structure, displacement based on thermal expansion can be utilized.

Further, when the heat transfer controlling member is small, or a change in temperature is small so that a displacement sufficient to close the flow path cannot be obtained, a plurality of small-width flow paths may be provided in parallel, and heat transfer controlling members are, respectively, provided in the flow paths .

In addition, as shown in FIG. 18, a plurality of heat transfer controlling members may be arranged to increase the flow path resistance to thereby reduce the heat transfer amount, even if the flow path cannot be closed. [Example 6]

In Example 6, a fuel cell system in which the heat transfer controlling mechanism of the present invention is used for heat exchange control between a fuel cell and a fuel tank will be described.

FIG. 19 is a schematic diagram illustrating the fuel cell system of this example. The fuel cell system of this example includes an air hole 406 for taking, from outside air, oxygen used as an oxidizer in a power generation reaction.

Moreover, the hole also serves to discharge generated water to the outside as water vapor. Air may be taken in by natural diffusion, or may be supplied by a fan or the like.

Further, on one side surface, there are provided

electrodes 408 for extracting electricity.

The inside of the fuel cell system includes a polymer elecrtolyte membrane 403, a fuel electrode 404, an oxidizer electrode 402, a fuel cell unit 401 including a catalyst, a fuel tank 405 for storing a fuel, and a wiring portion 407 for collecting electricity which has been generated by respective fuel cell units.

The fuel cell system of this embodiment has dimensions of 50 mm x 30 mm x 10 mm.

Respective elements of the fuel cell system of the present invention will now be described in detail, First, the fuel cell unit 401 will be described.

In the fuel cell unit, fuel (hydrogen) is supplied to the fuel electrode 404, and an oxidizer

(oxygen or air) is supplied to the oxidizer electrode 402. Thus, a catalytic reaction takes place. As a result, power generation is performed.

At that time, water is produced as a product. The reaction formulae in the fuel electrode 404 and the oxidizer electrode 402 are expressed as below.

Fuel electrode: H ₂ → 2H ⁺ + 2e ^~

Oxidizer electrode: 1/2 O ₂ + 2H ⁺ + 2e ^~ -» H ₂ O

As is seen from the above formulae, there is a proportional relationship between the amount of obtained electricity and the amount of consumed hydrogen .

When it is assumed that power generation of a current value of I [A] is performed, the amount of consumed hydrogen becomes 5.1 _* 10 ^~6 * I [mol/s] .

Moreover, heat is produced accompanying the power generation. The theoretical heat generation amount is calculated as described below. When it is assumed that the power generation amount is P[W] and the electromotive force per each fuel cell unit is v [V], the heat generation amount H _c is expressed as below.

Heat Generation Amount H _c = P ^x (vo - v) í v = I ^x (V ₀ - v) wherein vo is the theoretical open circuit voltage (1.23 [V] at 25 ⁰ C). Since the fuel cell is generally used at about 0.6 V for each fuel cell unit, heat which is approximately identical to the generated power is produced.

The fuel tank 405 will now be described.

It is assumed that hydrogen is used as a fuel in this example. The case where a hydrogen storage alloy is filled in the tank will be described.

In general, since the withstand pressure of a polymer electrolyte membrane used in the fuel cell is 0.3 to 0.5 MPa, it is preferable that the fuel cell is used in a state where the differential pressure between the inside of the fuel cell and the outside air is within the range of 0.1 MPa or less.

For example, as a hydrogen storage alloy having the characteristic such that the release pressure of hydrogen is 0.2 MPa at ordinary temperature, LaNi ₅ may be used. When it is further assumed that the volume of the fuel tank is one half of the volume of the entire fuel cell system, and the thickness of the tank wall is 1 mm, the volume of the fuel tank is calculated to be about 5.2 cm ³ . Since LaNi ₅ can absorb/release 1.1 wt . % of hydrogen in terms of weight, when the filling rate is assumed to be 50 %, the amount of hydrogen stored within the fuel tank is 0.2 g, so that the amount of energy which can be generated is calculated to be about 5.7 [W-hr] .

FIG. 20 shows a change in hydrogen release rate of LaNi ₅ depending on temperature.

In general, in the case of a hydrogen storage alloy, with lowering of the temperature, the hydrogen release rate is reduced. Moreover, since the hydrogen release reaction is an endothermic reaction, the temperature is lowered with release of hydrogen, whereby the hydrogen release rate is reduced. Accordingly, in order to obtain a hydrogen release amount sufficient for power generation during fuel cell power generation, it is necessary to prevent lowering of the temperature of the fuel tank.

On the other hand, in general, in the case of a hydrogen storage alloy, with elevation of the temperature, the dissociation pressure of hydrogen increases . FIG. 21 shows a change in dissociation pressure of LaNi ₅ depending on temperature.

As is seen from FIG. 21, when the temperature inside the fuel tank exceeds 50°C, the internal pressure of the tank exceeds 4 atm. However, producing a fuel tank so as to tolerate such a high pressure leads to increase of the weight of the fuel tank. Moreover, this may cause a disadvantage such that a valve provided between the fuel tank and the fuel cell, for controlling the pressure of the fuel does not normally operate.

Accordingly, in order to prevent an abnormal elevation of the pressure inside the fuel tank, it is necessary to perform a control such that heat produced by power generation and heat supplied from the outside are not excessively transferred to the fuel tank.

FIG. 22 is a schematic diagram illustrating a configuration example of a heat transfer controlling mechanism in which the loop heat pipe described in Example 1 is used for heat exchange between the fuel tank 405 and the fuel cell unit 401 of the fuel cell. Specifically, in FIG. 22, there is adopted a

configuration in which the vaporizing portion 103 is disposed adjacent to the fuel cell 401 (on the fuel cell unit side) , and the condensing portion 104 is disposed adjacent to the fuel tank 405 (on the fuel tank side) .

When power generation is started, the fuel cell 401 produces heat. With the progress of the release of hydrogen, the temperature inside the fuel tank 405 is lowered. Accordingly, since the wettability changing portion 109 exhibits hydrophilicity, the working fluid is circulated, so that heat exchange is actively performed. With the progress of the heat exchange, the temperature inside the fuel tank 405 is elevated, and when the temperature of the wettability changing portion 109 exceeds 35°C, the wettability changing portion 109 exhibits hydrophobicity .

Thus, the condensed working fluid cannot reflow by the interruption of the wettability changing portion, whereby the function of the heat pipe is suspended.

As described above, the temperature and internal pressure of the fuel tank 405 can be controlled to be appropriate values. Although in this example the loop heat pipe described in Example 1 is used as the heat transfer controlling mechanism, even with a heat transfer

controlling mechanism of the present invention of another configuration, similar effects can be obtained.

[Example 7] In Example 7, a radiation amount controlling mechanism in a fuel cell system to which the present invention is applied will be described.

FIG. 23 is a diagram illustrating the radiation quantity controlling mechanism of this example. The fundamental configuration of the fuel cell system in this example is similar to the system described in Example 6 with reference to FIG. 19.

However, in this example, a member having air holes 406 is used as a radiating plate 503, the fuel cell 401 and the radiating plate 503 are thermally connected by a heat transfer member 501, and a thermal switch 502 is provided as a thermal junction therebetween.

At this time, it is preferable that the radiating plate 503 and the heat transfer member 501 each have a high thermal conductivity, and for example, a metal such as copper, graphite, or silicone rubber may be used.

The thermal switch 502 serves, when the temperature becomes a predetermined temperature or more, to thermally connect the fuel cell 401 and the radiating plate 503.

Such a thermal switch 502 may be made of a bimetal or a shape memory alloy.

Thus, when the temperature of the fuel cell 401 is low (power generation in an initial stage or power generation when the output is low or the outside air temperature is low) , the thermal switch is in OFF state, so that power generation can be performed in a state where the activity of the fuel cell is high without releasing heat of power generation to the outside.

On the other hand, when the temperature of the fuel cell 401 becomes high, the thermal switch 502 becomes ON state, so that heat is released toward the outside through the radiating plate 503, whereby it is possible to prevent the temperature of the fuel cell 401 from excessively rising.

The passage of air through the air holes 406 may be attained by natural diffusion, but when a fan or the like is used, the radiation efficiency can be improved.

Further, when a cathode flow path and the radiating plate of the fuel cell are connected through a water flow path 504, water produced accompanying power generation can be transported to the radiating plate.

Thus, the heat of vaporization of produced water can be utilized for radiation, so that the radiation

efficiency can be further improved, and excess water can be discharged to the outside.

As the water flow path 504, for example, fibers having water absorbing property can be used to guide water to the radiating plate 503 by a capillary force,

Moreover, as shown in FIG. 24, a pattern including a hydrophilic portion 506 and a hydrophobic portion 507 are formed between the fuel cell 401 (cathode flow path) and the radiating plate 503 of the fuel cell to thereby move water.

In this case, unlike the case utilizing a capillary force, water can be moved irrespective of the amount of water held in the radiating plate.

Moreover, when a water absorbing member such as a water absorbing agent is provided on the surface of the radiating plate, water can be stored on the radiating plate.

Further, as shown in FIG. 25, by adopting a configuration such that the air permeation rate of the air holes is changed by absorbing water amount, the air permeation rate can be increased in a wet state.

When the loop heat pipes as described in Examples 1 to 5 are used as the thermal switch 502, the heat transfer efficiency at the switch can be improved.

Particularly, by employing a configuration of

the heat pipe as shown in FIG. 26, including the heat transfer member 501 and the radiating plate 503, it is possible to improve the heat transfer efficiency and to uniformize a temperature variation of the radiating plate.

Namely, by employing the configuration in which the vaporizing portion 103 is provided adjacent to the fuel cell 401, the condensing portion 104 is provided adjacent to the radiating plate 503, and a heat transfer controlling member 505 is used as a thermal switch 502, it is possible to improve the heat transfer efficiency and to uniformize the temperature variance of the radiating plate. [Example 8] In Example 8, a radiation quantity controlling mechanism of a fuel cell of a form different from that of Example 7 will be described.

FIG. 27 is a diagram illustrating a radiation amount controlling mechanism of this example. The fundamental configuration of the fuel cell system in this example is similar to that of the system described in Example 6 with reference to FIG. 19.

However, in this example, as shown in FIG. 27, a heat spreader 511 is provided adjacent to the fuel cell 401.

When a fuel cell is used particularly in the

form of a stack, there is a tendency such that in a fuel cell unit located in the vicinity of the central portion of the stack, heat will reside to increase the temperature, and the temperature of a fuel cell unit in the vicinity of the end of the stack becomes low.

When there is generated a variance of temperature in the fuel cell stack, there appears a difference in humidity state of the electrolyte membrane, so that a variance of the characteristics will be generated.

As shown in FIG. 27, when the heat spreader 511 is provided, heat produced at the stack is first transferred to the heat spreader 511. The heat thus transferred is uniformly distributed in the heat spreader and then returns to the fuel cell stack, so that the unevenness of the temperature of the stack is reduced. Such a heat spreader 511 preferably has a high thermal conductivity in plane direction, and for example, a metallic plate such as aluminum or copper and graphite are suitably used.

Further, by applying a ceramic sheet to the surface, or by painting the surface of the heat spreader 511 and the fuel cell 401 in black, the emissivity in thermal radiation can be increased, so that the transfer of heat between the fuel cell 401 and the heat spreader 511 can be efficiently

performed in a non-contact mode by heat radiation.

Further, as shown in FIG. 28, by making a heat spreader 511 hollow, inserting a mesh 513 having a capillary force or the like into the hollow, and sealing a working fluid, a heat pipe can be provided to improve the heat transport efficiency.

Moreover, as shown in FIG. 29, by providing air holes in a heat spreader, the heat spreader 512 with air holes can be formed and used. Particularly, a configuration in which the loop heat pipe described in Example 3 is used as a heat spreader is illustrated in FIG. 30.

The vaporizing portion 103 of the heat pipe faces the fuel cell 401, and the condensing portion 104 is located on a side opposite thereto.

Thus, when the temperature of the fuel cell unit 401 is low (power generation in an initial stage or power generation when the output is low or the outside air temperature is low) , the working fluid becomes difficult to circulate by means of the heat transfer controlling member 505. Therefore, the heat resulting from power generation is not discharged to the outside and can rather be stored in the fuel cell, so that power generation can be performed in a state in which the activity of the fuel cell is high.

On the other hand, when the temperature of the fuel cell 401 becomes high, the heat transfer

controlling member 505 circulates the working fluid, so that heat is discharged to the outside through the heat spreader 512, whereby the elevation of the temperature of the fuel cell 401 can be prevented. When the air holes 406 are provided, the passage of air through the air holes 406 may be attained by natural diffusion, but when a fan or the like is used, the radiation efficiency can be improved.

Moreover, as shown in FIG. 31, a heat spreader 511 may be provided between a fuel cell 401 and a fuel tank 405.

In this case, the heat resulting from the power generation of the fuel cell 401 can be uniformly distributed in the stack to eliminate a variance, and the generated heat can be subjected to thermal exchange between the fuel cell 401 and the fuel tank 405 as is the case with Example 6.

Particularly, as illustrated in FIG. 32, by adopting a configuration in which a heat spreader is constituted by using a heat transfer controlling mechanism of the present invention, heat can be transferred to the fuel tank 405 only when the temperature of the fuel cell 401 becomes a predetermined temperature or more. On the other hand, when a configuration such as illustrated in FIG. 33 is adopted, heat can be transferred to the fuel tank 405 only when the

temperature of the fuel tank 405 becomes less than a predetermined temperature.

Incidentally, although in the present example, description has been made by taking the stack fuel cell as an example, the present invention can also be applied to a case where a plurality of fuel cells are arranged in the same plane and used or to a single unit fuel cell .

The heat transfer controlling mechanism of the present invention has effects of performance improvement, size reduction, and lowering of power consumption of a heat pipe, and is particularly useful for improvement of performance involved with thermal control as well as size reduction of a fuel cell using a polymer electrolyte membrane.

While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. The scope of the following claims is to be accorded the broadest interpretation so as to encompass all such modifications and equivalent structures and functions.

This application claims the benefit of Japanese Patent Applications No. 2006-293329, filed October 27, which is hereby incorporated by reference herein in its entirety.