Title:
HEAT TRANSMISSION GAS LEAKAGE AMOUNT REDUCTION METHOD AND PLASMA TREATMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/171195
Kind Code:
A1
Abstract:
Provided are a plasma treatment device and a leakage amount reduction method for heat transmission gas to be supplied between an edge ring and an electrostatic chuck. This heat transmission gas leakage amount reduction method includes: a step for placing an edge ring at a body part having an electrostatic chuck; a step for adhering the edge ring to the electrostatic chuck; a step for increasing the temperature of the edge ring; a step for decreasing the temperature of the edge ring; and a step for repeating, a plurality of times, the step for increasing the temperature and the step for decreasing the temperature.
Inventors:
OKA SHINSUKE (JP)
TAKAHASHI AKIRA (JP)
TAMURA DAISUKE (JP)
SHIMOMURA TSUBASA (JP)
TAKAHASHI AKIRA (JP)
TAMURA DAISUKE (JP)
SHIMOMURA TSUBASA (JP)
Application Number:
PCT/JP2023/003808
Publication Date:
September 14, 2023
Filing Date:
February 06, 2023
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H05H1/46; H01L21/3065
Foreign References:
| JP2019004086A | 2019-01-10 | |||
| JP2012195463A | 2012-10-11 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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