Title:
HEAT TREATMENT SYSTEM
Document Type and Number:
WIPO Patent Application WO/2004/070747
Kind Code:
A1
Abstract:
A heat treatment system in which the direction of a magnetic field being generated by a field generating means (20) in a region for heat treating an object is in parallel with the direction of the object being carried into a heat treatment vessel (2) by a carrying means (10) and in parallel with the horizontal direction of the entire heat treatment system, wherein the object is heat treated while being arranged such that the major surface thereof becomes parallel with the direction of the magnetic field being generated by the field generating means (20) in the heat treatment region. The heat treatment system employs a compact solenoid type magnet (air core coil) in order to simplify the structure of the field generating means. Consequently, the weight and height of the system can be saved without varying the installation area substantially. The heat treatment system can be installed in an ordinary clean room and can treat a large quantity of larger object as compared with prior art.
Inventors:
UENO HIROTO (JP)
Application Number:
PCT/JP2004/001241
Publication Date:
August 19, 2004
Filing Date:
February 06, 2004
Export Citation:
Assignee:
FUTEK FURNACE INC (JP)
UENO HIROTO (JP)
UENO HIROTO (JP)
International Classes:
C21D1/04; C21D9/00; F27B5/04; F27B5/12; F27B5/13; F27B5/14; F27B14/08; F27B14/14; F27B14/16; F27D3/12; H01L43/08; H01F41/22; (IPC1-7): H01F41/18; C21D1/04; F27B14/16; F27D3/12; H01F41/22; H01L43/08; H01L43/12
Foreign References:
| JP2000182956A | 2000-06-30 | |||
| JPH11259825A | 1999-09-24 | |||
| JP2002353226A | 2002-12-06 | |||
| JP2001135543A | 2001-05-18 | |||
| JP2003023191A | 2003-01-24 | |||
| US6181535B1 | 2001-01-30 |
Other References:
See also references of EP 1594145A4
Attorney, Agent or Firm:
Kurahashi, Akira (16-5 Shinbashi 5-chome, Minato-k, Tokyo 04, JP)
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