Title:
HEATER BLOCK FOR A RAPID THERMAL PROCESSING APPARATUS IN WHICH A COOLING WATER FLOW IS DIVIDED INTO AN UPPER LAYER AND A LOWER LAYER
Document Type and Number:
WIPO Patent Application WO/2011/021797
Kind Code:
A2
Abstract:
The present invention relates to a heater block for a rapid thermal processing apparatus, wherein a plurality of lamp pockets (21) for accommodating heating lamps are arranged, and cooling water inlet ports (111a, 111b) and cooling water outlet ports (112a, 112b) are arranged such that the lamp pockets (21) are cooled by the flow of the cooling water fed via the cooling water inlet ports (111a, 111b) and discharged via the cooling water outlet ports (112a, 112b). In detail, the cooling water inlet ports (111a, 111b) and the cooling water outlet ports (112a, 112b) are separately arranged into an upper layer and a lower layer, such that the flow of the cooling water fed via the cooling water inlet ports (111a, 111b) and discharged via the cooling water outlet ports (112a, 112b) is divided into an upper layer and a lower layer. Preferably, cooling water dispersion means (140) are installed at entries of the cooling water inlet ports (111a, 111b) so as to disperse the cooling water in a lateral direction. According to the present invention, the cooling water flows separately in the upper layer and the lower layer to improve cooling efficiency, and particularly, lower portions of the lamp pockets, in which heat discharged by the heating lamps is concentrated, can be maximally cooled. In addition, the cooling water dispersion means prevents the formation of a dead zone, thereby uniformly cooling the entirety of the heater block.
Inventors:
SHIM JANG WOO (KR)
KIM SUNG CHUL (KR)
KIM DONG HYUN (KR)
JEON HYO YOUNG (KR)
KIM SUNG CHUL (KR)
KIM DONG HYUN (KR)
JEON HYO YOUNG (KR)
Application Number:
PCT/KR2010/005120
Publication Date:
February 24, 2011
Filing Date:
August 04, 2010
Export Citation:
Assignee:
AP SYSTEMS INC (KR)
SHIM JANG WOO (KR)
KIM SUNG CHUL (KR)
KIM DONG HYUN (KR)
JEON HYO YOUNG (KR)
SHIM JANG WOO (KR)
KIM SUNG CHUL (KR)
KIM DONG HYUN (KR)
JEON HYO YOUNG (KR)
International Classes:
H05B3/40; H01J7/24
Foreign References:
| KR100346569B1 | 2002-08-03 | |||
| KR100500195B1 | 2005-07-14 | |||
| KR20090057729A | 2009-06-08 | |||
| KR20090052060A | 2009-05-25 | |||
| JP2003065696A | 2003-03-05 |
Attorney, Agent or Firm:
AJU KIM CHANG & LEE (KR)
특허법인아주양헌 (KR)
특허법인아주양헌 (KR)
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