Title:
HEATER SYSTEM, CERAMIC HEATER, PLASMA TREATMENT DEVICE AND ADSORPTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/188189
Kind Code:
A1
Abstract:
This heater system comprises a ceramic heater and a drive device. The ceramic heater comprises a ceramic substrate and a resistance heating element. The ceramic substrate comprises an upper surface. The resistance heating element extends along the upper surface of the ceramic substrate in the interior and on the surface of the ceramic substrate. The drive device comprises a main drive unit for supplying main power to the entirety of the resistance heating element, and an additional drive unit for supplying additional power to a divided section that is part of the resistance heating element by superimposing the additional power on the main power.
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Inventors:
MUNEISHI TAKESHI (JP)
Application Number:
PCT/JP2017/016229
Publication Date:
November 02, 2017
Filing Date:
April 24, 2017
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
H05B3/03; H01L21/683; H05B3/00; H05B3/10; H05B3/20
Foreign References:
| JP2007242913A | 2007-09-20 | |||
| JP2010016319A | 2010-01-21 | |||
| JP2003133195A | 2003-05-09 | |||
| JP2015191837A | 2015-11-02 | |||
| JP2004296254A | 2004-10-21 | |||
| JP2014132560A | 2014-07-17 | |||
| JP2005166451A | 2005-06-23 | |||
| JP2003123943A | 2003-04-25 |
Attorney, Agent or Firm:
IIJIMA, YASUHIRO (JP)
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