Title:
HELIUM LEAK DETECTOR
Document Type and Number:
WIPO Patent Application WO/2017/037842
Kind Code:
A1
Abstract:
[Problem] To allow correction of a measurement value using a theoretical background. [Solution] A helium leak detector connected to a specimen via a jig. This helium leak detector is provided with: an interface unit provided with an input field for inputting information related to the pressure at which the jig was exposed to the helium and information relation to the time for which the jig was exposed to the helium; a helium detection unit for detecting helium, and a correction unit for correcting the detection results detected by the helium detection unit, on the basis of information related to the pressure inputted from the interface unit, information relating to the time inputted from the interface unit, and a reference permeation/saturation amount of the jig inputted in advance.
Inventors:
IGAWA AKIO (JP)
Application Number:
PCT/JP2015/074745
Publication Date:
March 09, 2017
Filing Date:
August 31, 2015
Export Citation:
Assignee:
SHIMADZU EMIT CO LTD (JP)
International Classes:
G01M3/20
Foreign References:
| JPH1137883A | 1999-02-12 | |||
| JPS58179330A | 1983-10-20 |
Attorney, Agent or Firm:
NAGAI, Fuyuki (JP)
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