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Title:
HIGH-FREQUENCY POWER SUPPLY DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/029113
Kind Code:
A1
Abstract:
The high-frequency power supply device according to the present invention has a control unit that controls the output level of a synthetic output obtained by synthesizing the powers of the amplifier outputs of multistage power amplifiers. The control unit performs control by: (a) setting an amplifier output reference value pref for determining the output level of each amplifier output; (b) comparing the amplifier output reference value pref with each amplifier output feedback value pfb; (c) setting, with respect to each power amplifier, a manipulated variable MV for controlling the output level of the amplifier output of each power amplifier; and (d) controlling the output level of the amplifier output of each power amplifier on the basis of each set manipulated variable MV. In the high-frequency power supply device that synthesizes multiple amplifier output powers amplified by the multistage power amplifiers, the reduction of power supply efficiency is suppressed, which is caused by the power differences of the amplifier outputs of the respective power amplifiers.

Inventors:
TEI UNBOU (JP)
SUZUKI RYOTA (JP)
Application Number:
PCT/JP2023/006778
Publication Date:
February 08, 2024
Filing Date:
February 24, 2023
Export Citation:
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Assignee:
KYOSAN ELECTRIC MFG (JP)
International Classes:
H02M7/493; H02M7/48; H03F3/20; H03F3/68
Foreign References:
JP2018531054A2018-10-25
JPH08211139A1996-08-20
JP7068540B12022-05-16
JP2021106462A2021-07-26
JP2021533538A2021-12-02
Attorney, Agent or Firm:
AIWA INTERNATIONAL PATENT AGENCY (JP)
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