Title:
HIGH-MOLECULAR-WEIGHT NARROW-DISTRIBUTION PHS RESIN, AND PREPARATION METHOD THEREFOR AND USE THEREOF
Document Type and Number:
WIPO Patent Application WO/2024/066848
Kind Code:
A1
Abstract:
Disclosed are a high-molecular-weight narrow-distribution PHS resin that is controllable and easy to produce on a large scale, and a preparation method therefor and use thereof. The preparation method for the PHS resin provided by the present invention comprises the following steps: dropwise adding a compound monomer represented by formula (I) to a reaction system for an active anionic polymerization reaction, and performing a deprotection reaction to obtain the PHS resin. The present invention also provides a PHS resin obtained by the preparation method. The present invention also provides a resist comprising a base polymer, wherein the base polymer comprises the PHS resin. According to the present invention, an active anionic polymerization mode is adopted, and the monomer is added in a dropwise adding mode, so that the reaction process is controllable and facilitates industrial production, meanwhile, the obtained PHS resin has a relatively narrow molecular weight distribution.
Inventors:
YANG MEIYUE (CN)
Application Number:
PCT/CN2023/115150
Publication Date:
April 04, 2024
Filing Date:
August 28, 2023
Export Citation:
Assignee:
SHANGHAI BAYI SPACE ADVANCED MAT CO LTD (CN)
International Classes:
C08F112/14; C08F2/00; C08F8/00; G03F7/004
Foreign References:
| JPH0632818A | 1994-02-08 | |||
| CN105924553A | 2016-09-07 | |||
| CN115210208A | 2022-10-18 | |||
| JP2000026535A | 2000-01-25 | |||
| JP2001316418A | 2001-11-13 | |||
| JPH04356505A | 1992-12-10 | |||
| JPH0641222A | 1994-02-15 | |||
| JPH11255820A | 1999-09-21 |
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