HIGH-SENSITIVITY SINGLE-CHIP PUSH-PULL TYPE TMR MAGNETIC FIELD SENSOR

WIPO Patent Application WO/2017/076252

A1

A high-sensitivity single-chip push-pull type TMR magnetic field sensor (30) comprises a substrate (31) and two comb-shaped soft magnetic flux concentrators (36, 37) located on the substrate (31) and forming an interdigital structure. The comb-shaped soft magnetic flux concentrators (36, 37) respectively comprise N and N-1 rectangular comb teeth and corresponding comb seats, N being an integer greater than 1. Gaps are formed between comb teeth of one comb-shaped soft magnetic flux concentrator (36) and the comb seat of the other comb-shaped soft magnetic flux concentrator (37) in an X direction. Adjacent comb teeth form odd space gaps marked as 2m-1 and even space gaps marked as 2m in a +Y direction, m being an integer and 0