Title:
HIGH SENSITIVITY TERAHERTZ SENSOR AND PREPARATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2023/221692
Kind Code:
A1
Abstract:
The present invention provides a high sensitivity terahertz sensor, comprising a substrate; a metal microstructure array, comprising a plurality of metal microstructure units, the metal microstructure array covering the substrate to form a metasurface; and metal nanostructures, the metal nanostructures being located at gaps of the metal microstructure array, and the metal microstructure array and the metal nanostructures being both formed by direct writing and etching of a metal thin film on the substrate by means of pulsed laser. According to the present invention, terahertz waves are cooperatively enhanced by the metasurface and the metal nanostructures, the full action of the terahertz waves and an analyte is promoted, and the terahertz detection sensitivity is improved.
Inventors:
YE YUNXIA (CN)
MOU TONGLIN (CN)
ZHANG YABO (CN)
ZHAO RUI (CN)
DAI ZIJIE (CN)
REN XUDONG (CN)
MOU TONGLIN (CN)
ZHANG YABO (CN)
ZHAO RUI (CN)
DAI ZIJIE (CN)
REN XUDONG (CN)
Application Number:
PCT/CN2023/087753
Publication Date:
November 23, 2023
Filing Date:
April 12, 2023
Export Citation:
Assignee:
UNIV JIANGSU (CN)
International Classes:
G01N21/3586; B23K26/354; B23K26/70; B82Y40/00
Domestic Patent References:
| WO2021191768A2 | 2021-09-30 |
Foreign References:
| CN114942232A | 2022-08-26 | |||
| CN114374095A | 2022-04-19 | |||
| KR20180020614A | 2018-02-28 | |||
| CN103072940A | 2013-05-01 | |||
| CN114002181A | 2022-02-01 |
Other References:
ABRAMOVICH AMIR, AZOULAY YOSSI, ROTSHILD DAVID: "Real-Time Metasurface Sensor for Monitoring Micropoisons in Aqueous Solutions Based on Gold Nanoparticles and Terahertz Spectroscopy", SENSORS, MDPI, CH, vol. 22, no. 3, CH , pages 1279, XP093110864, ISSN: 1424-8220, DOI: 10.3390/s22031279
OH HARIM, PYATENKO ALEXANDER, LEE MYEONGKYU: "Laser dewetting behaviors of Ag and Au thin films on glass and Si substrates: Experiments and theoretical considerations", APPLIED SURFACE SCIENCE, ELSEVIER, AMSTERDAM , NL, vol. 475, 1 May 2019 (2019-05-01), Amsterdam , NL , pages 740 - 747, XP093110869, ISSN: 0169-4332, DOI: 10.1016/j.apsusc.2019.01.055
OH HARIM, PYATENKO ALEXANDER, LEE MYEONGKYU: "Laser dewetting behaviors of Ag and Au thin films on glass and Si substrates: Experiments and theoretical considerations", APPLIED SURFACE SCIENCE, ELSEVIER, AMSTERDAM , NL, vol. 475, 1 May 2019 (2019-05-01), Amsterdam , NL , pages 740 - 747, XP093110869, ISSN: 0169-4332, DOI: 10.1016/j.apsusc.2019.01.055
Attorney, Agent or Firm:
NANJING IPZHI INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)
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