HIGH-SENSITIVITY THERMAL MICRO-FLOW SENSOR BASED ON PHASE CHANGE MATERIAL

WIPO Patent Application WO/2024/067123

A1

A high-sensitivity thermal micro-flow sensor based on a phase change material, comprising a single crystal substrate (7), a fluid layer (5), and two fixed support beams provided with sensing units. The single crystal substrate (7) is made of a single crystal silicon material, a dense thermal insulating dielectric film (6) is deposited on the single crystal silicon substrate, and the two fixed support beams are respectively suspended upstream and downstream of a micro-flow channel; and the sensing units consisting of heating resistors (4) and thermistors (1) are located on the upper surfaces of silicon dioxide isolation layers of the fixed support beams. By improving the sensitive material and using phase change material layers having a high absolute value of temperature coefficient of resistance as thermistors, the detection sensitivity of the sensor is improved, and the two heating resistors (4) are independently controlled by an external power supply circuit, so that independent control of respective temperatures of the thermistors (1) can be realized, thereby avoiding the influence of hysteresis characteristics of the thermistor phase change material on the performance of the sensor, and enabling the micro-flow sensor to meet the engineering requirements for measuring extremely low flow.

CAO YUNQI (CN)
ZHOU YUSHAN (CN)
WANG XIAOWEI (CN)
HOU DIBO (CN)
ZHANG GUANGXIN (CN)
ZHANG HONGJIAN (CN)

PCT/CN2023/118785

April 04, 2024

September 14, 2023

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UNIV ZHEJIANG (CN)

G01F1/684; G01F1/69; G01F15/18

HANGZHOU QIUSHI PATENT OFFICE CO., LTD. (CN)

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