Title:
HIGH-STABILITY EXCIMER LASER APPARATUS
Document Type and Number:
WIPO Patent Application WO/2023/273392
Kind Code:
A1
Abstract:
A high-stability excimer laser apparatus, comprising a discharge resonant cavity, a line width narrowing module, a measurement module and a control module. The line width narrowing module comprises a beam expanding apparatus and an echelle grating, which are sequentially arranged in a laser emission direction of a first side of the discharge resonant cavity. The measurement module comprises a central wavelength fine measurement apparatus and a central wavelength coarse measurement apparatus, wherein the central wavelength coarse measurement apparatus comprises a reflection apparatus, a light beam convergence apparatus and a first photoelectric detection apparatus, and is used for performing central wavelength coarse measurement, and the central wavelength fine measurement apparatus is arranged on a second side opposite the first side of the discharge resonant cavity, and is used for receiving a laser beam which is emitted from the second side, and for performing central wavelength fine measurement. The control module is respectively connected to the discharge resonant cavity, the central wavelength fine measurement apparatus and the central wavelength coarse measurement apparatus, and is used for adjusting a parameter in the discharge resonant cavity according to measurement results of the central wavelength fine measurement apparatus and the central wavelength coarse measurement apparatus.
Inventors:
LIU GUANGYI (CN)
JIANG RUI (CN)
XU XIANGYU (CN)
ZHAO JIANGSHAN (CN)
SU GUOQIANG (CN)
LIU BIN (CN)
FENG ZEBIN (CN)
JIANG RUI (CN)
XU XIANGYU (CN)
ZHAO JIANGSHAN (CN)
SU GUOQIANG (CN)
LIU BIN (CN)
FENG ZEBIN (CN)
Application Number:
PCT/CN2022/079621
Publication Date:
January 05, 2023
Filing Date:
March 07, 2022
Export Citation:
Assignee:
BEIJING RSLASER OPTO ELECTRONICS TECH CO LTD (CN)
International Classes:
H01S3/081; H01S3/13
Domestic Patent References:
| WO1999046836A1 | 1999-09-16 |
Foreign References:
| CN113659417A | 2021-11-16 | |||
| CN105973480A | 2016-09-28 | |||
| CN102155997A | 2011-08-17 | |||
| US6317448B1 | 2001-11-13 |
Attorney, Agent or Firm:
BEIJING TSINGYUANHUI INTELLECTUAL PROPERTY LAW FIRM (CN)
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