Title:
HIGH-TEMPERATURE THREE-DIMENSIONAL HALL SENSOR WITH REAL-TIME WORKING TEMPERATURE MONITORING FUNCTION AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2021/103052
Kind Code:
A1
Abstract:
A high-temperature three-dimensional Hall sensor with a real-time working temperature monitoring function and a manufacturing method therefor, belong to the field of semiconductor sensors. Technical solution: a buffer layer, an epitaxial layer and a barrier layer are sequentially grown on a substrate, and a high-density two-dimensional electron gas generated by polarization charge induction exists in the potential well at the heterojunction interface of the epitaxial layer; the lower surface of the substrate is provided with a vertical Hall sensor for sensing the magnetic field parallel to the device surface, and the upper surface of the barrier layer is provided with a "+"-shaped horizontal Hall sensor for sensing the magnetic field perpendicular to the device surface. Beneficial effects: the magnetic field in any direction in the space can be measured at a high temperature by utilizing a fully wide-band gap material suitable for a high-temperature environment, the characteristics such as small size and high sensitivity are provided, accurate magnetic field measurement and real-time working temperature monitoring can be carried out while normal work of the sensor is not affected, and it is expected to be widely used in various military, aerospace, medical, micro and nano sensors in the future.
Inventors:
HUANG HUOLIN (CN)
ZHANG HUI (CN)
ZHANG HUI (CN)
Application Number:
PCT/CN2019/122543
Publication Date:
June 03, 2021
Filing Date:
December 03, 2019
Export Citation:
Assignee:
UNIV DALIAN TECH (CN)
International Classes:
H01L43/04; H01L27/22; H01L43/06; H01L43/10; H01L43/14
Foreign References:
| CN107966669A | 2018-04-27 | |||
| CN108538866A | 2018-09-14 | |||
| CN109270476A | 2019-01-25 | |||
| CN108649117A | 2018-10-12 | |||
| CN109244234A | 2019-01-18 | |||
| US20190148624A1 | 2019-05-16 |
Attorney, Agent or Firm:
DALIAN CHICCO PATENT OFFICE (CN)
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