HOLDER AND VAPOR PHASE GROWTH APPARATUS

Title:

HOLDER AND VAPOR PHASE GROWTH APPARATUS

Document Type and Number:

WIPO Patent Application WO/2023/234159

Kind Code:

A1

Abstract:

A holder according to an embodiment of the present invention includes a part having non-oriented polycrystalline 3C-SiC on a surface, and a substrate can be loaded on the holder.

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Inventors:

WATANABE TORU (JP)
DAIGO YOSHIAKI (JP)
YAJIMA MASAYOSHI (JP)

Application Number:

PCT/JP2023/019456

Publication Date:

December 07, 2023

Filing Date:

May 25, 2023

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Assignee:

NUFLARE TECHNOLOGY INC (JP)

International Classes:

C30B25/12; C23C16/458; C30B29/36; H01L21/205; H01L21/683

Domestic Patent References:

WO2012086239A1

2012-06-28

Foreign References:

JP2006060195A	2006-03-02
JPH11199323A	1999-07-27

Attorney, Agent or Firm:

IKEGAMI, Tetsuma et al. (JP)

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