Title:
HOLDING DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/136096
Kind Code:
A1
Abstract:
This holding device, which is for holding an object on a first surface of a disk-shaped first plate member, comprises: the first plate member having the first surface and a second surface provided at the side opposite to the first surface; a disk-shaped second plate member which has a diameter larger than that of the first surface and has a third surface, a fourth surface provided at the side opposite to the third surface, and a heating resistor; a first junction layer which is disposed between the second surface and the third surface and is for joining the first plate member and the second plate member; a base member having a fifth surface and a sixth surface provided at the side opposite to the fifth surface; and a second junction layer which is disposed between the fourth surface and the fifth surface and is for joining the second plate member and the base member. The outer circumference of at least one of the first junction layer and the second junction layer is located so as to be withdrawn more toward the inner side than the outer circumference of the second plate member, when viewed in the lamination direction of the first plate member, the second plate member, and the base member.
Inventors:
KAWAMURA YUJI (JP)
YAMAGUCHI TAKASHI (JP)
SHIMIZU KAORI (JP)
UEMATSU HIDEKI (JP)
YAMAGUCHI TAKASHI (JP)
SHIMIZU KAORI (JP)
UEMATSU HIDEKI (JP)
Application Number:
PCT/JP2022/047607
Publication Date:
July 20, 2023
Filing Date:
December 23, 2022
Export Citation:
Assignee:
NITERRA CO LTD (JP)
International Classes:
H01L21/683; C23C14/50; H01L21/205; H01L21/3065; H02N13/00
Domestic Patent References:
| WO2020213368A1 | 2020-10-22 |
Foreign References:
| JP2012248693A | 2012-12-13 | |||
| JP2016160123A | 2016-09-05 |
Attorney, Agent or Firm:
COSMOS INTERNATIONAL PATENT & TRADEMARK OFFICE (JP)
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