Title:
HOT WIRE CHEMICAL VAPOR DEPOSITION APPARATUS, SILICON-BASED THIN FILM DEPOSITION METHOD AND SOLAR CELL
Document Type and Number:
WIPO Patent Application WO/2024/027294
Kind Code:
A1
Abstract:
The present invention relates to the technical field of solar cell processing. Disclosed are a hot wire chemical vapor deposition (HWCVD) apparatus, a silicon-based thin film deposition method and a solar cell, which are used for solving the problems of high energy consumption, a low process gas utilization rate and poor film-formation uniformity existing in a PECVD method, and are also used for solving the problems of a complex structure and hot wire sagging existing in a horizontal HWCVD apparatus. The HWCVD apparatus comprises a gas supply device, a vacuum cavity, a gas distribution plate, an insulating bearing member, a hot wire, binding posts, a power supply and a carrier plate, wherein the hot wire has a first end and a second end, which are opposite each other, and both the first end and the second end are electrically connected to the binding posts horizontally arranged. The end of each binding post that connects to the hot wire can provide an elastic pull for the hot wire, so as to tension the hot wire when same is heated to deform. Thus, the hot wire is always in a horizontal state.
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Inventors:
LI JIA (CN)
LIU YONG (CN)
YANG MIAO (CN)
YAO YUYANG (CN)
LIU HUANRONG (CN)
QIN ZENGFENG (CN)
GONG YANG (CN)
LU JUNXIONG (CN)
QU MINGHAO (CN)
XU XIXIANG (CN)
LIU YONG (CN)
YANG MIAO (CN)
YAO YUYANG (CN)
LIU HUANRONG (CN)
QIN ZENGFENG (CN)
GONG YANG (CN)
LU JUNXIONG (CN)
QU MINGHAO (CN)
XU XIXIANG (CN)
Application Number:
PCT/CN2023/096087
Publication Date:
February 08, 2024
Filing Date:
May 24, 2023
Export Citation:
Assignee:
LONGI GREEN ENERGY TECHNOLOGY CO LTD (CN)
International Classes:
C23C16/46; H01L31/18
Foreign References:
| CN115287633A | 2022-11-04 | |||
| CN213878126U | 2021-08-03 | |||
| CN112899641A | 2021-06-04 | |||
| CN202881386U | 2013-04-17 | |||
| CN114351123A | 2022-04-15 | |||
| CN107400875A | 2017-11-28 | |||
| US20140113084A1 | 2014-04-24 |
Attorney, Agent or Firm:
BEIJING RUN ZEHENG INTELLECTUAL PROPERTY LAW FIRM (CN)
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