Title:
HUMIDITY-SENSITIVE CAPACITOR, MANUFACTURING METHOD THEREFOR, AND HUMIDITY MEASURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/252317
Kind Code:
A1
Abstract:
A method for manufacturing a humidity-sensitive capacitor, comprising: obtaining a substrate (1); using an electroplating process to fabricate a pad (3) and interdigitated comb electrodes (2) on an upper surface of the substrate (1); and fabricating a humidity-sensitive layer (4) on an upper surface and a side surface of the comb electrodes (2) to obtain a humidity-sensitive capacitor, the thickness of the humidity-sensitive layer (4) being greater than the thickness of the comb electrodes (2). When fabricating the comb electrodes (2), an electroplating process is used, which may cause the thickness of the comb electrodes (2) to be greater than 1 micrometer. The increase in the thickness of the comb electrodes (2) results in an increase in the facing area between the interdigitated comb electrodes (2), such that the basic capacitance (C) and capacitance change of the humidity-sensitive capacitor are increased, and the capacitance sensitivity is increased, thereby reducing the design difficulty of a humidity-sensitive capacitance detection circuit.
Inventors:
LV YANG (CN)
HOU XIAOWEI (CN)
ZHENG LIANGGUANG (CN)
REN HAO (CN)
LI JUPING (CN)
ZHANG PO (CN)
WU PENG (CN)
HOU XIAOWEI (CN)
ZHENG LIANGGUANG (CN)
REN HAO (CN)
LI JUPING (CN)
ZHANG PO (CN)
WU PENG (CN)
Application Number:
PCT/CN2021/102767
Publication Date:
December 08, 2022
Filing Date:
June 28, 2021
Export Citation:
Assignee:
NINGBO CRRC TIMES TRANSDUCER TECH CO LTD (CN)
International Classes:
G01N27/22; H01G7/00
Foreign References:
| CN105241927A | 2016-01-13 | |||
| CN106017515A | 2016-10-12 | |||
| CN102507660A | 2012-06-20 | |||
| CN106568539A | 2017-04-19 | |||
| CN111579603A | 2020-08-25 | |||
| CN1845327A | 2006-10-11 | |||
| US5608374A | 1997-03-04 |
Attorney, Agent or Firm:
NINGBO YINZHOU SHENGFEI PATENT ATTORNEY (SPECIAL GENERAL PARTNERSHIP) (CN)
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