Title:
ILLUMINATION OPTICAL DEVICE, AND EXPOSURE DEVICE AND METHOD
Document Type and Number:
WIPO Patent Application WO/2005/036619
Kind Code:
A1
Abstract:
An illumination optical device that realizes, when mounted for example on an exposure device, an illumination condition suitable for a mask pattern where two kinds of patterns having different characteristics are mixed. The illumination optical device has a first light flux conversion element (7) for converting light flux from a light source section (1) to light flux having a first cross-sectional shape corresponding to a first region on an illumination pupil surface, a second light flux conversion element (8) for converting the light flux from the light source section to light flux having a second cross-sectional shape corresponding to a second region on the illumination pupil surface, a beam splitter (5) for splitting the light flux from the light source section and guiding each of the split light flux to the first light flux conversion element and the second light flux conversion element, and intensity changing means (2, 3, 5) for changing the ratio between the intensity of light reaching the first region through the first light flux conversion element and the intensity of light reaching the second region through the second light flux conversion element.
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Inventors:
TOYODA MITSUNORI (JP)
Application Number:
PCT/JP2004/014323
Publication Date:
April 21, 2005
Filing Date:
September 30, 2004
Export Citation:
Assignee:
NIKON CORP (JP)
TOYODA MITSUNORI (JP)
TOYODA MITSUNORI (JP)
International Classes:
G02B19/00; G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G02B19/00; G03F7/20
Foreign References:
| JPH06204121A | 1994-07-22 | |||
| JP2003090978A | 2003-03-28 | |||
| JP2000114157A | 2000-04-21 | |||
| JPH0653120A | 1994-02-25 | |||
| JPH07283121A | 1995-10-27 | |||
| JP2002359176A | 2002-12-13 |
Attorney, Agent or Firm:
Yamaguchi, Takao (10 Kanda-tsukasacho 2-chome, Chiyoda-k, Tokyo 48, JP)
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