Title:
ILLUMINATION OPTICAL SYSTEM, EXPOSURE DEVICE, AND METHOD FOR MANUFACTURING ARTICLE
Document Type and Number:
WIPO Patent Application WO/2022/124211
Kind Code:
A1
Abstract:
An illumination optical system (IL) illuminates a surface to be illuminated using a light flux from a light source (1), and includes an optical element (3) that divides the light flux from the light source into a plurality of light fluxes, and includes a plurality of flat surfaces, and a microlens array (4) that is irradiated with the divided plurality of light fluxes in a superimposed state. The optical element changes the shape of a light intensity distribution of the light flux from the light source. Provided by such a configuration is an illumination optical system capable of making the light intensity distribution uniform by a simple configuration.
Inventors:
NAKAMURA YUJI (JP)
KOBAYASHI DAISUKE (JP)
MINODA KEN (JP)
KOBAYASHI DAISUKE (JP)
MINODA KEN (JP)
Application Number:
PCT/JP2021/044392
Publication Date:
June 16, 2022
Filing Date:
December 03, 2021
Export Citation:
Assignee:
CANON KK (JP)
International Classes:
G02B3/00; G02B19/00; G03F7/20
Foreign References:
| JPH11150051A | 1999-06-02 | |||
| JPH03252122A | 1991-11-11 | |||
| JPH1154426A | 1999-02-26 | |||
| JPH0620914A | 1994-01-28 |
Attorney, Agent or Firm:
ABE Takuma et al. (JP)
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