Title:
ILLUMINATION OPTICAL SYSTEM AND ILLUMINATION METHOD, AND EXPOSURE METHOD AND DEVICE
Document Type and Number:
WIPO Patent Application WO/2014/077405
Kind Code:
A1
Abstract:
An illumination optical system for illuminating a reticle surface by means of illumination light from a light source, the system comprising: a spatial light modulator having a plurality of mirror elements; a polarization control system that is arranged between the surface on which the mirror elements are arranged and the reticle surface, and that changes the polarization state of light heading toward the reticle surface via the plurality of mirror elements; and an optical rotator plate that is arranged between the arrangement surface and the polarization control system, and that makes the polarization state of the light heading toward the polarization control system linearly polarized light in a direction that diagonally intersects with the incident surface. Thus it is possible to maintain a high degree of freedom in relation to changes in polarization state.
Inventors:
SHIRAISHI NAOMASA (JP)
Application Number:
PCT/JP2013/081125
Publication Date:
May 22, 2014
Filing Date:
November 19, 2013
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
H01L21/027; G02B5/30; G02B17/08; G02B19/00; G03F7/20
Foreign References:
| JP2012074694A | 2012-04-12 | |||
| JP2012199552A | 2012-10-18 | |||
| JP2012256742A | 2012-12-27 |
Attorney, Agent or Firm:
OMORI SATOSHI (JP)
Omori 聡 (JP)
Omori 聡 (JP)
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