Title:
ILLUMINATOR, EXPOSING METHOD AND APPARATUS, AND DEVICE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/1999/049505
Kind Code:
A1
Abstract:
An illuminator for illuminating a surface to be illuminated, comprising a light source (1) for producing a light beam of predetermined wavelength, wavefront-division optical integrator (451) including unit optical systems, a condenser optical systems (9, 11) for directing the light beam to the surface to be illuminated, and assisting optical members (OMA) for deflecting the light beam through the unit optical systems, at least one assisting optical member being correspondingly disposed in one of the unit optical systems.
Inventors:
KOMATSUDA HIDEKI (JP)
KANAYAMAYA NOBUMICHI (JP)
TANITSU OSAMU (JP)
SHIBUYA MASATO (JP)
KANAYAMAYA NOBUMICHI (JP)
TANITSU OSAMU (JP)
SHIBUYA MASATO (JP)
Application Number:
PCT/JP1999/001442
Publication Date:
September 30, 1999
Filing Date:
March 23, 1999
Export Citation:
Assignee:
NIKON CORP (JP)
KOMATSUDA HIDEKI (JP)
KANAYAMAYA NOBUMICHI (JP)
TANITSU OSAMU (JP)
SHIBUYA MASATO (JP)
KOMATSUDA HIDEKI (JP)
KANAYAMAYA NOBUMICHI (JP)
TANITSU OSAMU (JP)
SHIBUYA MASATO (JP)
International Classes:
G03F7/20; (IPC1-7): H01L21/027; G03F7/20
Foreign References:
| JPH1197340A | 1999-04-09 | |||
| JPH1050599A | 1998-02-20 | |||
| JPH0945607A | 1997-02-14 |
Other References:
See also references of EP 1069600A4
Attorney, Agent or Firm:
Inoue, Yoshio (Nihonbashi 3-chome Chuo-ku Tokyo, JP)
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