IMAGE OBSERVATION DEVICE AND ILLUMINATION OPTICAL SYSTEM FOR SAME

Title:

IMAGE OBSERVATION DEVICE AND ILLUMINATION OPTICAL SYSTEM FOR SAME

Document Type and Number:

WIPO Patent Application WO/2022/107725

Kind Code:

A1

Abstract:

[Problem] To make it possible to observe an observed object at high resolution and to recognize the angle of inclination of the surface of the observed object over a wide range. [Solution] An image observation device 100 that comprises: an illumination optical system 116 that shines illumination light at an observed object W; and an observation optical system 122 that collects object light from the observed object W and guides the object light to a detector 126. An object lens 122A faces the observed object W. A beam splitter 116B is arranged on the opposite side of the object lens 122A from the observed object so as to be coaxial with an illumination optical axis L1 of the illumination optical system 116 and an observation optical axis L2 of the observation optical system 122. A relay image RI of an illumination light splitting member 114 that splits wavelength regions R, G, B of the illumination light into a plurality of different solid angle regions IS1, IS2, IS3 is positioned on the near side of the object lens 122A.

Inventors:

MASUMURA SHIGEKI (JP)

Application Number:

PCT/JP2021/041949

Publication Date:

May 27, 2022

Filing Date:

November 15, 2021

Export Citation:

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Assignee:

MACHINE VISION LIGHTING INC (JP)

International Classes:

G02B21/06; G01N21/84; G02B21/18

Domestic Patent References:

WO2019245785A1

2019-12-26

Foreign References:

JP5866586B1	2016-02-17
JP6451821B1	2019-01-16
JP2008049168A	2008-03-06
JP2017156694A	2017-09-07
JP5866573B1	2016-02-17
JP2020076717A	2020-05-21
JP2013120099A	2013-06-17
JP5866573B1	2016-02-17
JP5866586B1	2016-02-17
JPH0151821B2	1989-11-06
US5965875A	1999-10-12

Other References: