Title:
IMAGING DEVICE, AND ELECTRONIC APPARATUS
Document Type and Number:
WIPO Patent Application WO/2023/017640
Kind Code:
A1
Abstract:
The present invention suppresses a deterioration in image quality while suppressing a deterioration in transfer efficiency. An imaging device according to an embodiment is provided with a plurality of pixels arranged in a two-dimensional grid formation, wherein each pixel comprises a photoelectric conversion unit which is provided on a first surface side of a semiconductor substrate and which performs photoelectric conversion of incident light, a vertical gate electrode provided in the semiconductor substrate so as to be in close proximity to the photoelectric conversion unit from a second surface side on the opposite side to the first surface, a gate insulating film provided between the vertical gate electrode and the semiconductor substrate, a transfer gate electrode connected to the vertical gate electrode on the second surface of the semiconductor substrate, and a first diffusion region provided on the second surface side of the semiconductor substrate, and wherein the vertical gate electrode has a structure in which a bottom portion on the photoelectric conversion unit side thereof is more diffused than an upper portion on the transfer gate electrode side thereof.
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Inventors:
NISHIDA KEIJI (JP)
NAKAMURA YUSUKE (JP)
SUGIMOTO MASATAKA (JP)
NAKAMURA YUSUKE (JP)
SUGIMOTO MASATAKA (JP)
Application Number:
PCT/JP2022/012067
Publication Date:
February 16, 2023
Filing Date:
March 16, 2022
Export Citation:
Assignee:
SONY SEMICONDUCTOR SOLUTIONS CORP (JP)
International Classes:
H01L27/146; H01L29/417
Foreign References:
| US20150243693A1 | 2015-08-27 | |||
| JP2021005619A | 2021-01-14 | |||
| JP2020009883A | 2020-01-16 | |||
| JP2016136584A | 2016-07-28 | |||
| JP2018190797A | 2018-11-29 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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