Title:
IMAGING DEVICE, INSPECTION DEVICE USING SAID IMAGING DEVICE, AND IMAGING METHOD
Document Type and Number:
WIPO Patent Application WO/2024/106458
Kind Code:
A1
Abstract:
Provided are an imaging device with which it is possible to obtain a tomographic image having resolution in the depth direction of an object being measured, an inspection device using the imaging device, and an imaging method. This imaging device comprises: a light source 20 that irradiates an object W being measured with emitted light at a certain angle of incidence, the emitted light having a wavelength range that can pass through the object W being measured; an image formation optical system 31 that acquires reflected light from the object W being measured irradiated with the emitted light from the light source 20; a light receiver 32 that photoelectrically converts the reflected light acquired by the image formation optical system 31 with a plurality of pixels to continuously generate image data of the object W being measured; a partial image generating unit 62 that extracts data of specific pixels from a plurality of image data items generated by the light receiver 32 to generate partial images composed of the data of the specific pixels; and a tomographic image generating unit 63 that combines a plurality of partial images to generate a tomographic image of a depth corresponding to the specific pixels. The object W being measured, the light source 20, the coupling optical system 31, and the light receiver 32 move relative to each other.
Inventors:
MIYAZAKI ITARU (JP)
YAMAGUCHI TOMOHIKO (JP)
TAKAHASHI YOSHIFUMI (JP)
EMOTO AKIRA (JP)
YAMAGUCHI TOMOHIKO (JP)
TAKAHASHI YOSHIFUMI (JP)
EMOTO AKIRA (JP)
Application Number:
PCT/JP2023/041064
Publication Date:
May 23, 2024
Filing Date:
November 15, 2023
Export Citation:
Assignee:
UNIV TOKUSHIMA (JP)
International Classes:
G01N21/49; G01N21/896
Domestic Patent References:
| WO2011081141A1 | 2011-07-07 | |||
| WO2017169732A1 | 2017-10-05 |
Foreign References:
| JP2010060330A | 2010-03-18 | |||
| JP2015219090A | 2015-12-07 | |||
| JP2009281846A | 2009-12-03 | |||
| JP2004245637A | 2004-09-02 | |||
| JP2008249386A | 2008-10-16 | |||
| JP2000346802A | 2000-12-15 | |||
| US6495833B1 | 2002-12-17 |
Attorney, Agent or Firm:
KITAHARA, Yuki et al. (JP)
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