Title:
IMAGING METHOD
Document Type and Number:
WIPO Patent Application WO2003087946
Kind Code:
A3
Abstract:
An optical image is formed in a radiation-sensitive layer (5), by a number of sub-illuminations, in each of which an array of light valves (21-25) and a corresponding array of converging elements (91-95) are used to form a pattern of spots (111-115) in the resist layer in accordance with a sub-image pattern. Between the sub-illuminations, the resist layer is displaced relative to the arrays. Bright and well-defined spots are obtained by using refractive lenses (43) as converging elements. The radiation-sensitive layer may be a resist layer on top of a substrate wherein a device is to be configured by means of lithography or an electrostatic charged layer used in a printer.
Inventors:
NELLISSEN ANTONIUS J M (NL)
Application Number:
PCT/IB2003/001372
Publication Date:
April 08, 2004
Filing Date:
April 14, 2003
Export Citation:
Assignee:
KONINKL PHILIPS ELECTRONICS NV (NL)
NELLISSEN ANTONIUS J M (NL)
NELLISSEN ANTONIUS J M (NL)
International Classes:
B41J2/447; B41J2/465; G03F7/20; H01L21/027; (IPC1-7): G03F7/20; B41J2/447
Domestic Patent References:
| WO2002012961A1 | 2002-02-14 |
Foreign References:
| US6133986A | 2000-10-17 |
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