IMPEDANCE MATCHING CIRCUIT - ADAMANT NAMIKI PREC JEWEL CO LTD

Title:

IMPEDANCE MATCHING CIRCUIT

Document Type and Number:

WIPO Patent Application WO/2019/103134

Kind Code:

A1

Abstract:

[Problem] To provide an impedance matching circuit capable of being used for a high-power application of several tens of watts or more, and capable of higher-speed impedance matching. [Solution] An impedance matching circuit provided with a variable frequency alternating-current power source is connected to a desired object load, the frequency of the variable frequency alternating-current power source is changed, the trajectory of an output impedance is represented in a spiral form on a Smith chart, and the output impedance is either matched to an impedance being the complex conjugate of the impedance of the object load, or is brought into a desired numerical range. Furthermore, a plurality of frequency ranges in which the output impedance is either matched to the impedance being the complex conjugate of the impedance of the object load, or is brought into the desired numerical range are caused to exist. It is preferable that the impedance being the complex conjugate of the impedance of the object load be plotted in a predetermined place within the whole range on the Smith chart, and that the frequency range in which the frequency of the variable frequency alternating-current power source is changed be a desired frequency range.

More Like This:

WO/2017/112048	SMART IMPEDANCE MATCHING FOR HIGH-SPEED I/O
JPH06327289	HIGH FREQUENCY EQUIPMENT
WO/1997/044812	METHOD OF AND APPARATUS FOR CONTROLLING REACTIVE IMPEDANCES OF A MATCHING NETWORK CONNECTED BETWEEN AN RF SOURCE AND AN RF PLASMA PROCESSOR

Inventors:

SUZUKI ASAKO (JP)
TANI TOHRU (JP)
NAKA SHIGEYUKI (JP)
OHIRA TAKASHI (JP)
MIYAZAKI MOTOAKI (JP)
TSUKAMOTO SATOSHI (JP)
SAKAI NAOKI (JP)

Application Number:

PCT/JP2018/043337

Publication Date:

May 31, 2019

Filing Date:

November 26, 2018

Export Citation:

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Assignee:

ADAMANT NAMIKI PREC JEWEL CO LTD (JP)
NATIONAL UNIV CORPORATION SHIGA UNIV OF MEDICAL SCIENCE (JP)
NATIONAL UNIV CORPORATION TOYOHASHI UNIV OF TECHNOLOGY (JP)

International Classes:

H03H7/40; H03H7/38

Foreign References:

JP6157036B1	2017-07-05
JP2006310245A	2006-11-09
JP2014072806A	2014-04-21

Attorney, Agent or Firm:

ADAMANT NAMIKI PRECISION JEWEL CO., LTD. (JP)

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