IMPRINT DEVICE AND IMPRINT METHOD

Title:

IMPRINT DEVICE AND IMPRINT METHOD

Document Type and Number:

WIPO Patent Application WO/2013/122109

Kind Code:

A1

Abstract:

An imprint device for transferring a pattern from a mold (1) to an article being molded (2). Said imprint device comprises the following: a stage (32) and a cover (33) for applying pressure to the mold (1) and the article being molded (2); a frame (43) that surrounds the stage (32) and has a hole into which the stage (32) can be inserted; a first moving means that can move the stage (32) and/or the cover (33) towards or away from each other; a second moving means (46) that can move the cover (33) and/or the frame (43) towards or away from each other; a first evacuating means (45) that evacuates an evacuation chamber (40) comprising the stage (32), the frame (43), and either the cover (33), the mold (1), or the article being molded (2) and removes a fluid from between the mold (1) and the article being molded (2); and a second evacuating means (35) that removes a fluid from a space formed between the cover (33) and either the mold (1) or the article being molded (2). This makes it possible to reduce the size and cost of this imprint device.

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Inventors:

KAWAGUCHI HIROSUKE (JP)
TANAKA SATORU (JP)

Application Number:

PCT/JP2013/053425

Publication Date:

August 22, 2013

Filing Date:

February 13, 2013

Export Citation:

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Assignee:

SCIVAX CORP (JP)

International Classes:

B29C59/02; H01L21/027

Domestic Patent References:

WO2004062886A1

2004-07-29

Foreign References:

JP2008155521A	2008-07-10
JP2008230027A	2008-10-02
JP2006018977A	2006-01-19
JP2011020272A	2011-02-03
JPH06114933A	1994-04-26
JP2009154393A	2009-07-16

Other References: