Title:
IMPRINT METHOD AND IMPRINT MOLD MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2016/021223
Kind Code:
A1
Abstract:
An imprint method using a mold having a mesa structure and/or a transfer substrate includes a resin supply step, a contact step, a curing step, and a mold-removal step, wherein the resin supply step includes supplying a resin to be molded and forming a balance layer in a region outside a pattern formation region of a transfer substrate in which a pattern structure is planned to be formed.
Inventors:
NAGAI TAKAHARU (JP)
INAZUKI YUICHI (JP)
SUZUKI KATSUTOSHI (JP)
HIKICHI RYUGO (JP)
ICHIMURA KOJI (JP)
HARADA SABUROU (JP)
INAZUKI YUICHI (JP)
SUZUKI KATSUTOSHI (JP)
HIKICHI RYUGO (JP)
ICHIMURA KOJI (JP)
HARADA SABUROU (JP)
Application Number:
PCT/JP2015/057128
Publication Date:
February 11, 2016
Filing Date:
March 11, 2015
Export Citation:
Assignee:
DAINIPPON PRINTING CO LTD (JP)
International Classes:
H01L21/027; B29C59/02
Foreign References:
| JP2014011431A | 2014-01-20 | |||
| JP2012504336A | 2012-02-16 | |||
| JP2014049709A | 2014-03-17 | |||
| JP2010530641A | 2010-09-09 | |||
| JP2004523906A | 2004-08-05 | |||
| JP2014179548A | 2014-09-25 |
Attorney, Agent or Firm:
YONEDA Junzo et al. (JP)
Junzo Yoneda (JP)
Junzo Yoneda (JP)
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