Title:
IMPRINT MOLD MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2014/080858
Kind Code:
A1
Abstract:
Provided is an imprint mold manufacturing method capable of preventing accumulation of transfer resin on the transfer roll. The present invention provides an imprint mold manufacturing method provided with: a resin coating process for coating a photo- or heat-curable resin composition on a pattern transfer mold that has a detailed relief pattern; and a transfer process for forming a reversed pattern of the relief pattern on the entire circumference of the transfer roll by transferring the resin composition to the entire circumference of a cylindrical transfer roll and curing the resin composition.
Inventors:
MIZUKAMI YUTAKA (JP)
Application Number:
PCT/JP2013/081013
Publication Date:
May 30, 2014
Filing Date:
November 18, 2013
Export Citation:
Assignee:
SOKEN KAGAKU KK (JP)
International Classes:
B29C33/38; B29C59/04; H01L21/027
Domestic Patent References:
| WO2011049097A1 | 2011-04-28 | |||
| WO2012018045A1 | 2012-02-09 |
Foreign References:
| JPH0724914A | 1995-01-27 | |||
| JP2003181918A | 2003-07-03 | |||
| JP2011083984A | 2011-04-28 | |||
| JPH03235233A | 1991-10-21 | |||
| JP2010149492A | 2010-07-08 | |||
| JP2006064455A | 2006-03-09 |
Other References:
See also references of EP 2923818A4
Attorney, Agent or Firm:
SK INTELLECTUAL PROPERTY LAW FIRM et al. (JP)
SK patent business corporation (JP)
SK patent business corporation (JP)
Download PDF:
Previous Patent: IMPRINT MOLD MANUFACTURING METHOD, IMPRINT MOLD, AND IMPRINT MOLD MANUFACTURING KIT
Next Patent: GAS SENSOR
Next Patent: GAS SENSOR