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Title:
IMPROVED LAMPHEAD FOR A RAPID THERMAL PROCESSING CHAMBER
Document Type and Number:
WIPO Patent Application WO2003014645
Kind Code:
A3
Abstract:
A semiconductor processing system and method. The system includes an assembly of radiant energy sources and a programmable switch array configured to selectively deliver power to each radiant energy source based on a plurality of control signals. The method includes measuring the temperature at a plurality of regions on a substrate and controlling a plurality of radiant energy sources to correct any non-radial temperature discontinuities.

Inventors:
KNOOT PETER A
STEFFAS PAUL
Application Number:
PCT/US2002/025642
Publication Date:
May 08, 2003
Filing Date:
August 08, 2002
Export Citation:
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Assignee:
APPLIED MATERIALS INC (US)
International Classes:
H01L21/205; H01L21/00; H01L21/26; (IPC1-7): H01L21/00
Foreign References:
EP1100114A22001-05-16
US6167195A2000-12-26
EP1091622A22001-04-11
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