Title:
INERTIAL FORCE SENSOR
Document Type and Number:
WIPO Patent Application WO/2013/157264
Kind Code:
A1
Abstract:
The inertial force sensor according to the present invention is provided with: fixed parts; beam parts that are connected to the fixed parts; spindle parts that are connected to the other ends of the beam parts and are displaced by an inertial force while causing the beam parts to deform; conductive parts that are provided to the spindle parts; strain-sensitive resistors that are provided to the beam parts in order to detect deformation of the beam parts; first and second fault diagnosis electrodes that are provided to the fixed parts; first fault diagnosis wiring for connecting the first fault diagnosis electrode and a conductive part via a beam part; and second fault diagnosis wiring for connecting the second fault diagnosis electrode and a conductive part via a beam part. This inertial force sensor has high reliability, and does not continue to output an erroneous output signal when a crack occurs in the spindle parts.
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Inventors:
IMANAKA TAKASHI
AIZAWA HIROYUKI
YOKOTA TAKESHI
AIZAWA HIROYUKI
YOKOTA TAKESHI
Application Number:
PCT/JP2013/002611
Publication Date:
October 24, 2013
Filing Date:
April 18, 2013
Export Citation:
Assignee:
PANASONIC CORP (JP)
International Classes:
G01P21/00; G01P15/12; G01P15/18
Foreign References:
| JPH01163673A | 1989-06-27 | |||
| JPH06229778A | 1994-08-19 | |||
| JP2005534897A | 2005-11-17 | |||
| JPH0743381A | 1995-02-14 | |||
| JPH06148230A | 1994-05-27 | |||
| JP2001066319A | 2001-03-16 |
Attorney, Agent or Firm:
NAITO, Hiroki et al. (JP)
Hiroki Naito (JP)
Hiroki Naito (JP)
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