Title:
INFORMATION PROCESSING APPARATUS, METHOD FOR PROCESSING INFORMATION, DISCRIMINATOR GENERATING APPARATUS, METHOD FOR GENERATING DISCRIMINATOR, AND PROGRAM
Document Type and Number:
WIPO Patent Application WO/2016/092783
Kind Code:
A1
Abstract:
To conduct defective/non-defective determination on an inspection image with high accuracy, while preventing a feature amount from becoming higher in dimension, and increasing in arithmetic processing time, an inspection image which includes an object to be inspected is acquired; a plurality of hierarchy inspection images by conducting frequency conversion on the inspection image is generated; feature amounts corresponding to types of defects which may be included in the object to be inspected regarding at least one hierarchy inspection image among the plurality of hierarchy inspection images are extracted; and information on the defect of the inspection image based on the extracted feature amount is output.
Inventors:
OKUDA HIROSHI (JP)
Application Number:
PCT/JP2015/006010
Publication Date:
June 16, 2016
Filing Date:
December 03, 2015
Export Citation:
Assignee:
CANON KK (JP)
International Classes:
G06T7/00; G01N21/88
Foreign References:
| JP2008020235A | 2008-01-31 | |||
| JP2013245985A | 2013-12-09 | |||
| JP2004144668A | 2004-05-20 | |||
| JP2005315748A | 2005-11-10 | |||
| JP2014173882A | 2014-09-22 |
Attorney, Agent or Firm:
ABE, Takuma et al. (30-2Shimomaruko 3-chome, Ohta-k, Tokyo 01, JP)
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