Title:
INFORMATION PROCESSING DEVICE, INFORMATION PROCESSING SYSTEM, INFORMATION PROCESSING METHOD, AND INFORMATION PROCESSING PROGRAM
Document Type and Number:
WIPO Patent Application WO/2023/063375
Kind Code:
A1
Abstract:
An information processing device (10) according to the present invention comprises a storage unit (201), a reception unit (101), a condition extraction unit (102), and an output control unit (103). The storage unit (201) stores experiment condition information including a plurality of experiment conditions for performance experiments regarding a lithography material to be used in a semiconductor lithography process, the experiment condition information being stored for each performance experiment. The reception unit (101) receives an input of utilization condition information including a plurality of utilization conditions in which the lithography material is to be utilized. The condition extraction unit (102) extracts experiment condition information similar to the inputted utilization condition information from among the plurality of experiment condition information stored in the storage unit (201). The output control unit (103) outputs the extracted experiment condition information.
Inventors:
FURUICHI KOTA (JP)
OOTSUKA NOBORU (JP)
FURUKAWA TSUYOSHI (JP)
KAWAKAMI TAKANORI (JP)
SHIMA MOTOYUKI (JP)
OOTSUKA NOBORU (JP)
FURUKAWA TSUYOSHI (JP)
KAWAKAMI TAKANORI (JP)
SHIMA MOTOYUKI (JP)
Application Number:
PCT/JP2022/038123
Publication Date:
April 20, 2023
Filing Date:
October 12, 2022
Export Citation:
Assignee:
JSR CORP (JP)
International Classes:
G03F7/20
Foreign References:
| JPH0444312A | 1992-02-14 | |||
| US6566280B1 | 2003-05-20 | |||
| JP2021043325A | 2021-03-18 | |||
| JP2005060601A | 2005-03-10 |
Attorney, Agent or Firm:
TORANOMON INTELLECTUAL PROPERTY FIRM (JP)
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