Title:
INFRARED ARRAY SENSOR
Document Type and Number:
WIPO Patent Application WO/2010/114001
Kind Code:
A1
Abstract:
An infrared array sensor is provided with a base substrate and a plurality of pixel sections. A dug section is provided in the base substrate. The pixel sections are arranged on the base substrate so as to cover the dug section. The pixel sections are provided with a thin film structure, a plurality of first infrared absorption sections, and a plurality of temperature sensing elements. A slit is provided in the thin film structure, and the slit divides the thin film structure into a plurality of cantilevers. The cantilevers are provided with a first end at one end in the length direction, and a second end at the other end. The temperature sensing elements are provided to the cantilevers. The temperature sensing elements are configured in such a manner as to generate the output signal corresponding to the temperature change when the temperature of the temperature sensing elements changes.
Inventors:
TSUJI KOJI (JP)
Application Number:
PCT/JP2010/055803
Publication Date:
October 07, 2010
Filing Date:
March 31, 2010
Export Citation:
Assignee:
PANASONIC ELEC WORKS CO LTD (JP)
TSUJI KOJI (JP)
TSUJI KOJI (JP)
International Classes:
G01J1/02; H01L35/32; H04N5/33
Domestic Patent References:
| WO2010035739A1 | 2010-04-01 | |||
| WO2010035738A1 | 2010-04-01 |
Foreign References:
| JP2000065639A | 2000-03-03 | |||
| JP2003304005A | 2003-10-24 | |||
| JPH06229821A | 1994-08-19 | |||
| JPH07507868A | 1995-08-31 | |||
| JP2008107307A | 2008-05-08 | |||
| JPS60186723A | 1985-09-24 | |||
| JPH11326064A | 1999-11-26 | |||
| JP2010078451A | 2010-04-08 | |||
| JP2001309122A | 2001-11-02 | |||
| JP3897055B1 | 2007-03-22 | |||
| JP3897056B1 | 2007-03-22 |
Other References:
SARRO, P.M. ET AL.: "An Integrated Thermal Infrared Sensing Array", SENSORS AND ACTUATORS, vol. 14, no. 2, 1988, pages 191 - 201, XP026547396
See also references of EP 2416135A4
See also references of EP 2416135A4
Attorney, Agent or Firm:
NISHIKAWA, Yoshikiyo et al. (JP)
Yoshikiyo Nishikawa (JP)
Yoshikiyo Nishikawa (JP)
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