Title:
INFRARED RAY IMAGING ELEMENT AND PROCESS FOR PRODUCTION THEREOF
Document Type and Number:
WIPO Patent Application WO/2011/096042
Kind Code:
A1
Abstract:
Disclosed is an infrared ray imaging element characterized by comprising: a substrate; a detection unit which comprises an infrared ray absorption section arranged above the substrate, placed apart from the substrate, and capable of absorbing infrared ray and a thermoelectric conversion section arranged between the infrared ray absorption section and the substrate, placed apart from the substrate, thermally connected to the infrared ray absorption section, and capable of converting the change in temperature caused by the infrared ray absorbed by the infrared ray absorption section into an electric signal; a wiring which is arranged above the substrate, placed apart from the substrate, and capable of transmitting the electric signal; a wiring region connection unit which is electrically connected to the wiring and extends from the wiring toward the substrate; and a support beam of which one end is connected to the substrate-side end of the wiring region connection unit, the other end is connected to the thermoelectric conversion section, and a support beam wiring for transmitting the electric signal from the thermoelectric conversion section to the wiring through the wiring region connection unit is formed, and which can support the detection unit above the substrate. The infrared ray imaging element has high sensitivity. Also disclosed is a process for producing the infrared ray imaging element.
Inventors:
FUJIWARA IKUO (JP)
YAGI HITOSHI (JP)
SASAKI KEITA (JP)
YAGI HITOSHI (JP)
SASAKI KEITA (JP)
Application Number:
PCT/JP2010/051413
Publication Date:
August 11, 2011
Filing Date:
February 02, 2010
Export Citation:
Assignee:
TOSHIBA KK (JP)
FUJIWARA IKUO (JP)
YAGI HITOSHI (JP)
SASAKI KEITA (JP)
FUJIWARA IKUO (JP)
YAGI HITOSHI (JP)
SASAKI KEITA (JP)
International Classes:
G01J1/44; H04N5/33
Foreign References:
| JP2005221334A | 2005-08-18 | |||
| JP2003106894A | 2003-04-09 | |||
| JP2000340848A | 2000-12-08 | |||
| JP2005303325A | 2005-10-27 | |||
| JP2002181627A | 2002-06-26 | |||
| JP2009109473A | 2009-05-21 |
Attorney, Agent or Firm:
HYUGAJI, MASAHIKO (JP)
Masahiko Hiugaji (JP)
Masahiko Hiugaji (JP)
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Claims: