Title:
INKJET PRINT HEAD
Document Type and Number:
WIPO Patent Application WO/2022/107546
Kind Code:
A1
Abstract:
This inkjet print head includes: an actuator substrate that has an ink flow passage including a pressure chamber; a movable film forming layer that includes a movable film, said movable film being positioned on the pressure chamber and demarcating a top surface section of the pressure chamber; a piezoelectric element that includes a lower electrode positioned on the movable film, a piezoelectric body film formed on the lower electrode, and an upper electrode formed on the piezoelectric body film; a hydrogen barrier film that, among the surfaces of the piezoelectric element, covers at least the entire side surfaces of the upper electrode and the piezoelectric body film; an interlayer insulating film that is formed on the movable film forming layer so as to cover the hydrogen barrier film; and wiring that is formed on the interlayer insulating film and is connected to the piezoelectric element, wherein a fuse is inserted partway along the wiring.
Inventors:
FUJIMORI YOSHIKAZU (JP)
Application Number:
PCT/JP2021/039019
Publication Date:
May 27, 2022
Filing Date:
October 21, 2021
Export Citation:
Assignee:
ROHM CO LTD (JP)
International Classes:
B41J2/14; H01L41/047; H01L41/053; H01L41/09
Foreign References:
| JP2019217736A | 2019-12-26 | |||
| JP2018199342A | 2018-12-20 | |||
| JP2016054286A | 2016-04-14 | |||
| US20180222181A1 | 2018-08-09 |
Attorney, Agent or Firm:
AI ASSOCIATION OF PATENT AND TRADEMARK ATTORNEYS (JP)
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