Title:
INSPECTION APPARATUS AND INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2014/196008
Kind Code:
A1
Abstract:
This inspection apparatus (100, 200) is provided with: three-dimensional measuring units (42, 43) that are capable of acquiring height information of an area to be inspected (120, 220); a two-dimensional measuring units (41, 43) that are capable of acquiring at least one kind of information among hue information, chroma information, and brightness information; and a control unit (51), which performs three-dimensional measurement, and corrects, on the basis of results of the three-dimensional measurement, an inspection region (140, 240) where the area to be inspected is to be inspected, and performs two-dimensional measurement in the corrected inspection region.
Inventors:
TABATA NOBUAKI (JP)
Application Number:
PCT/JP2013/065394
Publication Date:
December 11, 2014
Filing Date:
June 03, 2013
Export Citation:
Assignee:
YAMAHA MOTOR CO LTD (JP)
International Classes:
G01B11/02; G01N21/956; H05K3/34
Foreign References:
| JP2011149736A | 2011-08-04 | |||
| JP2010091569A | 2010-04-22 | |||
| JP2002031605A | 2002-01-31 | |||
| JP2012145484A | 2012-08-02 |
Attorney, Agent or Firm:
MIYAZONO, Hirokazu (JP)
Hirokazu Miyazono (JP)
Hirokazu Miyazono (JP)
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