Title:
INSPECTION DEVICE AND METHOD FOR CAPTURING INSPECTION IMAGE
Document Type and Number:
WIPO Patent Application WO/2021/009884
Kind Code:
A1
Abstract:
An inspection device for performing inspection using an inspection image of a substrate having a plurality of components disposed thereon is provided with: a fixed-focus camera; a lifting/lowering mechanism for lifting/lowering the camera relative to the substrate; a setting unit which acquires height information about the plurality of components and sets, by a predetermined setting technique, a reference position spaced apart from a surface of the substrate by a distance corresponding to the height of the components, so that an imaging surface of each component within an imaging range of the camera is located within the depth of field of the camera; and a control unit which controls the lifting/lowering mechanism and the camera so that the inspection image is captured after the camera is relatively lifted or lowered so as to have the focal point aligned at the reference position.
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Inventors:
KOBAYASHI TAKAHIRO (JP)
INAURA YUKI (JP)
FUJIMOTO TOMOYA (JP)
INAURA YUKI (JP)
FUJIMOTO TOMOYA (JP)
Application Number:
PCT/JP2019/028160
Publication Date:
January 21, 2021
Filing Date:
July 17, 2019
Export Citation:
Assignee:
FUJI CORP (JP)
International Classes:
H05K13/08; H01L21/60
Domestic Patent References:
| WO2010113450A1 | 2010-10-07 |
Foreign References:
| JP2015145797A | 2015-08-13 | |||
| JP2002310628A | 2002-10-23 | |||
| JP2011232825A | 2011-11-17 | |||
| JPH11201911A | 1999-07-30 | |||
| JP2017076900A | 2017-04-20 | |||
| JP2002310628A | 2002-10-23 |
Other References:
See also references of EP 4002976A4
Attorney, Agent or Firm:
ITEC INTERNATIONAL PATENT FIRM (JP)
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