Title:
INSPECTION DEVICE, METHOD, AND PROGRAM
Document Type and Number:
WIPO Patent Application WO/2021/084933
Kind Code:
A1
Abstract:
Provided is an inspection technology whereby the target for inspection is not limited to pattern defects. This inspection device inspects a target object and comprises: an acquisition unit that obtains a plurality of measurement data from measurement data for prescribed positions in prescribed patterns on the target object; and a distribution analysis unit that analyses the distribution between the prescribed patterns.
Inventors:
ISHIKAWA AKIO (JP)
Application Number:
PCT/JP2020/034392
Publication Date:
May 06, 2021
Filing Date:
September 11, 2020
Export Citation:
Assignee:
ALITECS CORP (JP)
International Classes:
G01N21/956; H01L21/66; G06T7/00
Foreign References:
| JP2006284433A | 2006-10-19 | |||
| JP2007149837A | 2007-06-14 | |||
| JP2016173252A | 2016-09-29 |
Attorney, Agent or Firm:
YAHAGI Tetsuo (JP)
Download PDF: