Title:
INSPECTION DEVICE AND INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2020/085205
Kind Code:
A1
Abstract:
This inspection device is for inspecting devices to be inspected. The devices to be inspected are formed on an object to be inspected, and are backlit image-capture devices upon which light is incident from the rear side, which is the reverse side from the side on which a wiring layer is provided. The inspection device has a loading platform on which is placed the object to be inspected in a state in which the rear surfaces of the image-capture devices face the loading platform. The loading platform comprises: a light-transmissive portion which includes a plate-shaped plate member made from a light-transmissive material, and upon which the object to be inspected is placed; and a light-emitting portion which is disposed in a position facing the object to be inspected with the light-transmissive portion interposed therebetween, and which emits light towards the light-transmissive portion. The light-transmissive portion allows the passage of light emitted from the light-emitting portion while diffusing said light.
Inventors:
AKIYAMA NAOKI (JP)
SAITO SUSUMU (JP)
NAKAYAMA HIROYUKI (JP)
KASAI SHIGERU (JP)
SAITO SUSUMU (JP)
NAKAYAMA HIROYUKI (JP)
KASAI SHIGERU (JP)
Application Number:
PCT/JP2019/040941
Publication Date:
April 30, 2020
Filing Date:
October 17, 2019
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/66; G01R31/28; H01L27/146
Foreign References:
| JP2004287368A | 2004-10-14 | |||
| JP2009170730A | 2009-07-30 |
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (JP)
Download PDF: