Title:
INSPECTION DEVICE AND INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2020/195138
Kind Code:
A1
Abstract:
Provided is an inspection device for inspecting a sample having a plurality of light-emitting elements formed thereon, the inspection device comprising: an excitation light source which generates excitation light with which the sample is irradiated; a dichroic mirror which splits fluorescence from the sample by transmitting or reflecting the fluorescence depending on the wavelength thereof; a camera for capturing an image of the fluorescence reflected by the dichroic mirror; a camera for capturing an image of the fluorescence that has passed through the dichroic mirror; and a control device which, on the basis of a first fluorescence image obtained by camera and a second fluorescence image obtained by camera, derives color irregularity information of the light-emitting elements. In the dichroic mirror, an edge shift width, which is the width of a wavelength band in which transmittance and reflectance vary in accordance with a change in wavelength, is wider than a full width half maximum of a normal fluorescence spectrum of the light-emitting elements.
Inventors:
NAKAMURA TOMONORI (JP)
IKEMURA KENICHIRO (JP)
OTAKA AKIHIRO (JP)
IKEMURA KENICHIRO (JP)
OTAKA AKIHIRO (JP)
Application Number:
PCT/JP2020/003263
Publication Date:
October 01, 2020
Filing Date:
January 29, 2020
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
H01L21/66; G01N21/64; H01L33/00
Foreign References:
| JP2009145550A | 2009-07-02 | |||
| JP2015010834A | 2015-01-19 | |||
| JPS63250835A | 1988-10-18 | |||
| JP2015010834A | 2015-01-19 |
Other References:
See also references of EP 3951844A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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