Title:
INSPECTION JIG AND INSPECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/039898
Kind Code:
A1
Abstract:
An inspection jig 2 comprises: film-shaped wiring substrates 21 - 23 in which electrodes E are disposed on one surface thereof; a base 7 which supports the wiring substrates 21 - 23 which are layered while exposing electrode regions A1 - A3, said electrode regions A1 - A3 being the regions in which the electrodes E of the wiring substrates 21 – 23 are disposed; and a plurality of probes Pr having base end parts which contact the electrode regions A1 - A3 and extending in a direction away from the electrode regions A1 - A3.
Inventors:
KAIDA MICHIO (JP)
Application Number:
PCT/JP2020/032338
Publication Date:
March 04, 2021
Filing Date:
August 27, 2020
Export Citation:
Assignee:
NIDEC READ CORP (JP)
International Classes:
H01L21/66; G01R1/067; G01R1/073
Foreign References:
| JP2019090775A | 2019-06-13 | |||
| JP2017142080A | 2017-08-17 | |||
| JP2008026027A | 2008-02-07 | |||
| JP2018132515A | 2018-08-23 | |||
| JP2019066449A | 2019-04-25 | |||
| JP2004069485A | 2004-03-04 |
Attorney, Agent or Firm:
YANAGINO Takao et al. (JP)
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