Title:
INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2022/070308
Kind Code:
A1
Abstract:
This control device: controls a contact probe in sync with a light that is a prescribed wavelength and is pulse-controlled; uses a measurement apparatus to measure characteristics of a sample to be inspected or a sample for analysis; and, using a circuit model created by an electrical characteristic analysis device that generates the circuit model on the basis of a value measured by the measurement apparatus, and a secondary electron detection signal detected by a charged particle beam device, estimates a circuit constant or a defect structure of the sample to be inspected.
Inventors:
MITSUGI SHOTA (JP)
NAKAMURA YOHEI (JP)
BIZEN DAISUKE (JP)
FUSE JUNICHI (JP)
TAKADA SATOSHI (JP)
TSUNO NATSUKI (JP)
NAKAMURA YOHEI (JP)
BIZEN DAISUKE (JP)
FUSE JUNICHI (JP)
TAKADA SATOSHI (JP)
TSUNO NATSUKI (JP)
Application Number:
PCT/JP2020/037156
Publication Date:
April 07, 2022
Filing Date:
September 30, 2020
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G01R31/302; H01L21/66; H01J37/04; H01J37/28
Foreign References:
| JP2013187510A | 2013-09-19 | |||
| JP2019139912A | 2019-08-22 | |||
| JP2011043346A | 2011-03-03 | |||
| JP2001313322A | 2001-11-09 | |||
| JP2008130582A | 2008-06-05 | |||
| JP2011014798A | 2011-01-20 |
Attorney, Agent or Firm:
SEIRYO I.P.C. (JP)
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