Title:
INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2022/092006
Kind Code:
A1
Abstract:
According to the present invention, an object to be inspected including a first polarizing plate and a first retardation film that is formed from a cured product of a polymerizable crystal liquid compound and is formed on one face of the first polarizing plate is irradiated with inspection light to determine the presence/absence of a defect in the first retardation film. The slow axis of a first retardation film and the slow axis of a second retardation film are disposed such that an angle formed therebetween becomes 10°-80°, the in-plane phase difference values at a wavelength of 550 nm of the first retardation film and a second retardation film are approximately equal to each other, the inspection light has a peak wavelength having a half width of the intensity peak of 30 nm or less and being different by 5 to 50 nm from the wavelength at which the amount of transmitted light of the object to be inspected and the retardation filter is minimized, within the wavelength range of 500-600 nm.
Inventors:
KOBAYASHI SHINJI (JP)
TAOKA NAOTO (JP)
TAOKA NAOTO (JP)
Application Number:
PCT/JP2021/039255
Publication Date:
May 05, 2022
Filing Date:
October 25, 2021
Export Citation:
Assignee:
SUMITOMO CHEMICAL CO (JP)
International Classes:
G02B5/30; G01M11/00; G01N21/88
Domestic Patent References:
| WO2021176797A1 | 2021-09-10 | |||
| WO2021124645A1 | 2021-06-24 |
Foreign References:
| JP2007212442A | 2007-08-23 | |||
| JP2007213016A | 2007-08-23 | |||
| JP2012198032A | 2012-10-18 | |||
| JP2009097915A | 2009-05-07 | |||
| JP2019070617A | 2019-05-09 | |||
| JP2018013438A | 2018-01-25 | |||
| JP2007327915A | 2007-12-20 |
Attorney, Agent or Firm:
NAKAYAMA, Tohru et al. (JP)
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