Title:
INSPECTION POSITION SPECIFICATION METHOD, THREE-DIMENSIONAL IMAGE GENERATION METHOD, AND INSPECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/065701
Kind Code:
A1
Abstract:
Provided are: an inspection position specification method with which accurate inspection is possible without specifying in advance the position (Z-direction position) of an inspection surface on an object to be inspected; a three-dimensional image generation method with which a three-dimensional image necessary for inspection can be generated without specifying in advance the position (Z-direction position) of an inspection surface on an object to be inspected, and with which inspection can be performed using the image; and an inspection device including these methods. An inspection device 100 comprises: a storage unit 34 that stores a radiation transmission image of an object to be inspected (substrate) and a three-dimensional image generated from the radiation transmission image; and a control unit 10. A process executed by the control unit 10 for specifying an inspection position in the three-dimensional image includes: a step for specifying, in the radiation transmission image, the position of a transmission image of an inspection position; and a step for specifying an inspection position in the three-dimensional image from the position of the transmission image.
Inventors:
HIRAYAMA TAKUMA (JP)
YAMAMOTO YOSUKE (JP)
YAMAMOTO YOSUKE (JP)
Application Number:
PCT/JP2018/035606
Publication Date:
April 04, 2019
Filing Date:
September 26, 2018
Export Citation:
Assignee:
SAKI CORP (JP)
International Classes:
G01N23/046; G01N23/18
Foreign References:
JP2011247588A | 2011-12-08 | |||
JP2005233760A | 2005-09-02 | |||
JP2011149737A | 2011-08-04 | |||
JP2003514233A | 2003-04-15 | |||
JP2008026334A | 2008-02-07 |
Other References:
See also references of EP 3690428A4
Attorney, Agent or Firm:
HOSAKA Joyo (JP)
Download PDF:
Previous Patent: DENTAL OBSERVATION DEVICE AND DISPLAY METHOD OF DENTAL IMAGE
Next Patent: INFORMATION PROCESSING DEVICE
Next Patent: INFORMATION PROCESSING DEVICE