Title:
INSPECTION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2019/017050
Kind Code:
A1
Abstract:
This inspection system is provided with: an inspection region provided with an inspection unit having a plurality of inspection units each of which has a tester and a probe card installed between the tester and an inspection target, and performs an electrical inspection on the inspection target; and a loader region that has an arrangement part which is installed on an end side in one direction of the inspection unit and in which a receiving container for the inspection target is arranged, and that has a loader which performs delivery of the inspection target between the receiving container and the inspection region. The inspection unit is configured such that inspection unit arrays formed by the plurality of inspection units arranged in one horizontal direction are disposed in multiple stages in multiple directions, the arrangement part is provided on one end portion side of the inspection unit, and the inspection region is further provided with: a plurality of transportation paths provided adjacent to each stage of the inspection unit array and extending in one direction; and a plurality of transportation mechanisms which are movably provided along each of the transportation paths and delivers, between the inspection units, the inspection target that is loaded from the loader.
More Like This:
| JP2003294799 | ENVIRONMENT TESTING DEVICE |
| JP2001091583 | SYSTEM AND CASSETTE FOR TESTING SEMICONDUCTOR CHIP |
| JPS60160631 | TESTING METHOD OF SEMICONDUCTOR INTEGRATED CIRCUIT |
Inventors:
KONISHI KENTARO (JP)
SHIKAGAWA HIROKI (JP)
FUJIHARA JUN (JP)
SHIKAGAWA HIROKI (JP)
FUJIHARA JUN (JP)
Application Number:
PCT/JP2018/018314
Publication Date:
January 24, 2019
Filing Date:
May 11, 2018
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/66; H01L21/677
Domestic Patent References:
| WO2009004968A1 | 2009-01-08 |
Foreign References:
| JP2016046285A | 2016-04-04 | |||
| JPS63229836A | 1988-09-26 | |||
| JP2016162803A | 2016-09-05 |
Attorney, Agent or Firm:
TAKAYAMA Hiroshi (JP)
Download PDF: