Title:
INSPECTION TOOL, AND INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2023/079992
Kind Code:
A1
Abstract:
The present invention provides an inspection tool and an inspection method with which it is possible to determine easily whether light having a wavelength of 222 nm and a wavelength of 254 nm has been radiated, even in sunlight. An inspection tool according to the present invention includes a sensing portion and a reference portion, wherein: the sensing portion includes a sensing layer for sensing light having a wavelength of 200 to 254 nm, at least; the reference portion includes a sensing layer and a transparent layer; and the transparent layer satisfies the relationships in formulas (1) and (2). Formula (1): 0%≤TMA200~254<15.0% Formula (2): 50.0%
Inventors:
IKEDA KIMI (JP)
Application Number:
PCT/JP2022/039420
Publication Date:
May 11, 2023
Filing Date:
October 24, 2022
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
C09B57/00; G01J1/02; C09K3/00; G01J1/50; G01N21/78; G02B5/22
Domestic Patent References:
| WO2022181288A1 | 2022-09-01 |
Foreign References:
| US6437346B1 | 2002-08-20 | |||
| JP2017524393A | 2017-08-31 | |||
| JP2007278904A | 2007-10-25 | |||
| JP3024525U | 1996-05-21 | |||
| JP2002122476A | 2002-04-26 | |||
| JPH0843197A | 1996-02-16 | |||
| JP2019187727A | 2019-10-31 | |||
| JP2022170959A | 2022-11-11 |
Attorney, Agent or Firm:
ITOH Hideaki et al. (JP)
Download PDF:
Previous Patent: PRODUCTION METHOD FOR WEDGE-SHAPED GLASS
Next Patent: COMPOUND, COMPOSITION, HOST MATERIAL, AND ORGANIC ELECTROLUMINESCENT ELEMENT
Next Patent: COMPOUND, COMPOSITION, HOST MATERIAL, AND ORGANIC ELECTROLUMINESCENT ELEMENT