Title:
INTEGRATED CIRCUIT DEVICES AND METHODS EMPLOYING AMORPHOUS SILICON CARBIDE RESISTOR MATERIALS
Document Type and Number:
WIPO Patent Application WO1997023002
Kind Code:
A1
Abstract:
Integrated circuits (10), including field emission devices (7), have a resistor element (4) of amorphous SixC1-x wherein 0
Inventors:
BEETZ CHARLES P
XU XUEPING
BRANDES GEORGE R
RAMANI SWAYUMBA V
BESSER RONALD S
XU XUEPING
BRANDES GEORGE R
RAMANI SWAYUMBA V
BESSER RONALD S
Application Number:
PCT/US1996/020374
Publication Date:
June 26, 1997
Filing Date:
December 20, 1996
Export Citation:
Assignee:
ADVANCED TECH MATERIALS (US)
SILICON VIDEO CORP (US)
SILICON VIDEO CORP (US)
International Classes:
H01J9/02; H01J1/304; H01J19/24; H01J21/10; H01J29/04; H01J31/12; H01L21/02; H01L21/822; H01L27/04; H01L31/0376; (IPC1-7): H01L31/0312
Foreign References:
| US4329699A | 1982-05-11 | |||
| US5140397A | 1992-08-18 | |||
| US4937454A | 1990-06-26 | |||
| US4412900A | 1983-11-01 | |||
| US5350490A | 1994-09-27 | |||
| US4827118A | 1989-05-02 | |||
| US4980736A | 1990-12-25 | |||
| US3789471A | 1974-02-05 |
Other References:
See also references of EP 0868752A4
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